Chemically amplified i-line positive resist for next-generation flat panel display

2017 ◽  
Author(s):  
Hsing-Chieh Lee ◽  
Ying-Hao Lu ◽  
Shin-Yih Huang ◽  
Wei-Jen Lan ◽  
Makoto Hanabata
Keyword(s):  
Flat Panel Display ◽  
Next Generation ◽  
Flat Panel ◽  
Chemically Amplified ◽  
Positive Resist

Performance of a chemically amplified positive resist for next-generation photomask fabrication

1998 ◽  
Author(s):  
Masa-aki Kurihara ◽  
Toshikazu Segawa ◽  
Daichi Okuno ◽  
Naoya Hayashi ◽  
Hisatake Sano
Keyword(s):  
Next Generation ◽  
Chemically Amplified ◽  
Positive Resist

scholarly journals Meters-Scale Large-Area Plasma Sources with Multiple Low-Inductance Antenna Units for Next-Generation Flat-Panel Display Processing

2007 ◽  
Vol 32 (2) ◽  
pp. 497-500 ◽  
Author(s):  
Daisuke Tsukiyama ◽  
Kousuke Takenaka ◽  
Yuichi Setsuhara ◽  
Kazuaki Nishisaka ◽  
Akinori Ebe
Keyword(s):  
Flat Panel Display ◽  
Next Generation ◽  
Large Area ◽  
Flat Panel ◽  
Plasma Sources

Chemically amplified positive resist for next-generation photomask fabrication

1999 ◽  
Author(s):  
Kohji Katoh ◽  
Kei Kasuya ◽  
Tadashi Arai ◽  
Toshio Sakamizu ◽  
Hidetoshi Satoh ◽  
...  
Keyword(s):  
Next Generation ◽  
Chemically Amplified ◽  
Positive Resist

scholarly journals Optimal Color Lighting for Scanning Images of Flat Panel Display using Simplex Search

2018 ◽  
Vol 4 (11) ◽  
pp. 133
Author(s):  
HyungTae Kim ◽  
EungJoo Ha ◽  
KyungChan Jin ◽  
ByungWook Kim
Keyword(s):  
Image Quality ◽  
Light Source ◽  
Light Emitting Diode ◽  
Optical Filters ◽  
Flat Panel Display ◽  
Flat Panel ◽  
Light Emitting ◽  
Simplex Search ◽  
Inspection Systems ◽  
Color Control

A system for inspecting flat panel displays (FPDs) acquires scanning images using multiline charge-coupled device (CCD) cameras and industrial machine vision. Optical filters are currently installed in front of these inspection systems to obtain high-quality images. However, the combination of optical filters required is determined manually and by using empirical methods; this is referred to as passive color control. In this study, active color control is proposed for inspecting FPDs. This inspection scheme requires the scanning of images, which is achieved using a mixed color light source and a mixing algorithm. The light source utilizes high-power light emitting diodes (LEDs) of multiple colors and a communication port to dim their level. Mixed light illuminates an active-matrix organic light-emitting diode (AMOLED) panel after passing through a beam expander and after being shaped into a line beam. The image quality is then evaluated using the Tenenbaum gradient after intensity calibration of the scanning images. The dimming levels are determined using the simplex search method which maximizes the image quality. The color of the light was varied after every scan of an AMOLED panel, and the variation was iterated until the image quality approached a local maximization. The number of scans performed was less than 225, while the number of dimming level combinations was 20484. The proposed method can reduce manual tasks in setting-up inspection machines, and hence is useful for the inspection machines in FPD processes.

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