Determination of mechanical stress in the silicon nitride films with a scanning electron microscope
2000 ◽
Vol 6
(4)
◽
pp. 380-387
◽
1999 ◽
Vol 105
(2-3)
◽
pp. 119-127
◽
2007 ◽
Vol 58
(11-12)
◽
pp. 1095-1103
◽
Keyword(s):
Keyword(s):