Surface profile measurement of highly reflective silicon wafer using wavelength tuning interferometer

2016 ◽  
Author(s):  
Yangjin Kim ◽  
Naohiko Sugita ◽  
Mamoru Mitsuishi
Keyword(s):  
Silicon Wafer ◽  
Surface Profile ◽  
Wavelength Tuning ◽  
Profile Measurement ◽  
Surface Profile Measurement

Surface profile measurement of a highly reflective silicon wafer by phase-shifting interferometry

2015 ◽  
Vol 54 (13) ◽  
pp. 4207 ◽  
Author(s):  
Yangjin Kim ◽  
Kenichi Hibino ◽  
Naohiko Sugita ◽  
Mamoru Mitsuishi
Keyword(s):  
Silicon Wafer ◽  
Surface Profile ◽  
Phase Shifting ◽  
Profile Measurement ◽  
Phase Shifting Interferometry ◽  
Surface Profile Measurement

Damage Characteristics of Dynamically Induced Incipient Spall in Ultrapure Aluminum

2018 ◽  
Vol 910 ◽  
pp. 130-136
Author(s):  
Hui Peng ◽  
Xiao Yang Pei ◽  
Ji Dong Yu ◽  
Mei Lan Qi ◽  
Jing Song Bai ◽  
...  
Keyword(s):  
Cross Section ◽  
Surface Profile ◽  
Chromatic Aberration ◽  
Profile Measurement ◽  
Plate Impact ◽  
Damage Characteristics ◽  
3D Surface Topography ◽  
Impact Experiments ◽  
Surface Profile Measurement ◽  
Ductile Fracture Process

A series of plate-impact experiments were performed to study the damage characteristics of incipient spall in ultrapure aluminum (99.999%). Surface profile measurement system based on the axial chromatic aberration was used to measure the cross section of “soft-recovered” samples and reconstruct the metallographic and 3D surface topography. Statistical analyses show that the size distribution, coalescence condition and connectivity factor of the voids are regularly affected by loading conditions. Based on this finding, the mechanisms that control the damage properties and evolution process of dynamic fracture are analyzed in detail. The results of this research offer an experimental quantitative microstructure description of the ductile fracture process.

Profile Measurement by Using a Femtosecond Laser Chromatic Confocal Probe

2020 ◽  
Author(s):  
Ryo Sato ◽  
Yuki Shimizu ◽  
Hiraku Matsukuma ◽  
Wei Gao
Keyword(s):  
Thermal Stability ◽  
Femtosecond Laser ◽  
Surface Profile ◽  
Sample Surface ◽  
Measurement Range ◽  
Laser Source ◽  
Profile Measurement ◽  
Experimental Setup ◽  
Chromatic Confocal Probe ◽  
Surface Profile Measurement

Abstract Confocal probes are widely employed in many industrial fields due to the depth-sectioning effect. The author’s group has also proposed a chromatic confocal probe employing a mode-locked femtosecond laser source which can realize an axial resolution of 30 nm and a measurement range of 40 μm Efforts have also been made to improve the thermal stability of the developed femtosecond laser chromatic confocal probe so that the probe can be applied for long-term displacement measurement or surface profile measurement. Meanwhile, surface profile measurement has not been carried out by using the developed femtosecond laser chromatic confocal probe. For the verification of the performance of developed probe in profile measurement, in this paper, an experimental setup is built and a basic experiment is carried out. By using the probe with further improved thermal stability, the measurement of a sample surface profile is carried out. In this paper, the development of the experimental setup with the femtosecond laser chromatic confocal probe, as well as the results of the surface profile measurements, is presented.

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