High precision and high aspect ratio laser drilling: challenges and solutions

2016 ◽  
Author(s):  
Hermann Uchtmann ◽  
Chao He ◽  
Arnold Gillner
Keyword(s):  
Aspect Ratio ◽  
High Precision ◽  
High Aspect Ratio ◽  
Laser Drilling

Non-diffraction-length Bessel-beam femtosecond laser drilling of high-aspect-ratio microholes in PMMA

Optik ◽  
2021 ◽  
Vol 229 ◽  
pp. 166295
Author(s):  
Haoran Wang ◽  
Fan Zhang ◽  
Kaiwen Ding ◽  
Ji'an Duan
Keyword(s):  
Aspect Ratio ◽  
Femtosecond Laser ◽  
High Aspect Ratio ◽  
Bessel Beam ◽  
Laser Drilling

High aspect ratio, high-quality microholes in PMMA: a comparison between femtosecond laser drilling in air and in vacuum

2014 ◽  
Vol 119 (1) ◽  
pp. 61-68 ◽  
Author(s):  
Bo Xia ◽  
Lan Jiang ◽  
Xiaowei Li ◽  
Xueliang Yan ◽  
Weiwei Zhao ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
Femtosecond Laser ◽  
High Aspect Ratio ◽  
Laser Drilling ◽  
High Quality

Optimization of plasma effect in laser drilling of high aspect ratio microvias

Laser Physics ◽  
2015 ◽  
Vol 25 (5) ◽  
pp. 056003 ◽  
Author(s):  
V N Tokarev ◽  
E A Cheshev ◽  
V V Bezotosnyi ◽  
V Yu Khomich ◽  
S I Mikolutskiy ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Laser Drilling ◽  
Plasma Effect

Laser Drilling on Elastomeric Polymers

2012 ◽  
Vol 591-593 ◽  
pp. 307-310
Author(s):  
Chun Lei Kang ◽  
Yan Xu ◽  
Kai Leung Yung ◽  
Wei Chen ◽  
Hang Liu
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Soft Lithography ◽  
Average Power ◽  
Pulsed Laser ◽  
Laser Drilling ◽  
Fabrication Method ◽  
Drilling Technology ◽  
Micro Features ◽  
Micro Structures

Elastomeric polymers have been used as moulds for fabricating micro structures in the soft lithography technology due to their elastic features and unstickiness to polymer features. Previously, the micro moulds were normally produced by imprinting on micro prototypes, which are fabricated using deep reactive etching or photolithography. In this paper, we introduce a direct mould fabrication method, which uses pulsed laser drilling technology to directly generate high aspect ratio patterns in elastomeric polymers. The effects of laser parameters such as pulse repetition rate and average power on the drilling qualities are systematically studied. The techniques presented in this paper would provide a more flexible way to fabricate high aspect ratio micro features on elastomer mould efficiently.

Laser drilling with a top-hat beam of micro-scale high aspect ratio holes in silicon nitride

2020 ◽  
Vol 281 ◽  
pp. 116636 ◽  
Author(s):  
Vahid Nasrollahi ◽  
Pavel Penchev ◽  
Afif Batal ◽  
Hoang Le ◽  
Stefan Dimov ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Laser Drilling ◽  
Micro Scale
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