Material analysis techniques used to drive down in-situ mask contamination sources

2016 ◽  
Author(s):  
Harm Dillen ◽  
Gerard Rebel ◽  
Jennifer Massier ◽  
Dominika Grodzinka ◽  
Richard J. Bruls
Keyword(s):  
Analysis Techniques ◽  
Material Analysis ◽  
Contamination Sources

Material analysis techniques using the ion mill

1996 ◽  
Vol 54 ◽  
pp. 1034-1035
Author(s):  
J. P. Benedict ◽  
R. M. Anderson ◽  
S. J. Klepeis
Keyword(s):  
Polished Surface ◽  
Surface Material ◽  
Analysis Techniques ◽  
Material Analysis ◽  
Optical Inspection ◽  
Electron Microscopy Analysis ◽  
Microscopy Analysis ◽  
Argon Ions ◽  
The Impact ◽  
Scanning Electron

Ion mills equipped with flood guns can perform two important functions in material analysis; they can either remove material or deposit material. The ion mill holder shown in Fig. 1 is used to remove material from the polished surface of a sample for further optical inspection or SEM ( Scanning Electron Microscopy ) analysis. The sample is attached to a pohshing stud type SEM mount and placed in the ion mill holder with the polished surface of the sample pointing straight up, as shown in Fig 2. As the holder is rotating in the ion mill, Argon ions from the flood gun are directed down at the top of the sample. The impact of Argon ions against the surface of the sample causes some of the surface material to leave the sample at a material dependent, nonuniform rate. As a result, the polished surface will begin to develop topography during milling as fast sputtering materials leave behind depressions in the polished surface.

In Situ Removal of Polyimide Layer Using Modified Decapsulator

2009 ◽  
Author(s):  
C. Ramachandra ◽  
B.M. Sweety ◽  
U.G. Chandan ◽  
D. Jaypal ◽  
Sarat Kumar Dash ◽  
...  
Keyword(s):  
Failure Analysis ◽  
Analysis Techniques ◽  
Alternative Method ◽  
Ic Package ◽  
Polyimide Layer

Abstract Removal of polyimide layer after decapsulation of IC package is essential for many of the failure analysis techniques. An alternative method for polyimide removal is described in this paper. The method suggests appropriate modification of dual acid decapsulation system for this purpose. Device integrity is verified after removal of polyimide layer. This method becomes promising for devices which are sensitive / vulnerable for exposure to plasma.

In Situ Diffraction Studies: Thermal Decomposition of a Natural Plumbojarosite and the Development of Rietveld-Based Data Analysis Techniques

2010 ◽  
Vol 651 ◽  
pp. 37-64 ◽  
Author(s):  
Ian C. Madsen ◽  
Ian E. Grey ◽  
Stuart J. Mills
Keyword(s):  
Thermal Decomposition ◽  
Amorphous Material ◽  
Data Sets ◽  
X Ray Diffraction ◽  
Data Set ◽  
X Ray ◽  
Analysis Techniques ◽  
Path Lengths ◽  
Instrument Configuration

A study of the thermal decomposition sequence of a sample of natural arsenian plumbojarosite has been undertaken using in situ X-ray diffraction. The sample was heated to 900°C using an Anton-Paar heating stage fitted to an INEL CPS120 diffractometer. The data were analysed using a whole-pattern, Rietveld based approach for the extraction of quantitative phase abundances. The instrument configuration used required the development and application of algorithms to correct for aberrations in the (i) peak intensities due to differing path lengths of incident and diffracted beams in the sample and (ii) peak positions due to sample displacement. Details of the structural models used were refined at selected steps in the pattern and then fixed for subsequent analysis. The data sequence consists of some 110 individual data sets which were analysed sequentially with the output of each run forming the input for analysis of the next data set. The results of the analysis show a complex breakdown and recrystallisation sequence including the formation of a major amount of amorphous material after initial breakdown of the plumbojarosite.

scholarly journals Multi-Material Wire Arc Additive Manufacturing of low and high alloyed aluminium alloys with in-situ material analysis

2021 ◽  
Vol 69 ◽  
pp. 378-390
Author(s):  
Tobias Hauser ◽  
Raven T. Reisch ◽  
Stefan Seebauer ◽  
Aashirwad Parasar ◽  
Tobias Kamps ◽  
...  
Keyword(s):  
Additive Manufacturing ◽  
Aluminium Alloys ◽  
Material Analysis ◽  
Wire Arc Additive Manufacturing ◽  
Alloyed Aluminium

Northumberland Strait bridge: analysis techniques and results

1996 ◽  
Vol 23 (1) ◽  
pp. 86-97 ◽  
Author(s):  
Amin Ghali ◽  
Gamil Tadras ◽  
Paul H. Langohr
Keyword(s):  
Cross Section ◽  
Structural Design ◽  
Major Part ◽  
Thermal Stresses ◽  
Atlantic Coast ◽  
Variable Depth ◽  
Analysis Techniques ◽  
Ice Forces ◽  
Creep And Shrinkage

The Northumberland Strait at the Atlantic coast of Canada will be crossed by a 13 km bridge. The major part of the superstructure will consist of 44 spans, each of length 250 m and a box cross section of variable depth 4.5–14 m. The superstructure, divided into units of maximum length 192 m, will be produced in a yard by segmental casting and multistage prestressing. These units will be assembled at their final position on top of the piers. Each pier is composed of two pieces, also produced in the yard and connected on site by cast in situ concrete. This paper describes selected analysis problems and their solutions employed in the structural design. The analysis problems are concerned with (i) dynamic response to ice forces; (ii) movements of pier footings and stiffness of the subgrade; (iii) variation of stresses and deformations during construction and during the life of the structure, considering the effects of creep and shrinkage of concrete and relaxation of the prestressed steel; and (iv) thermal stresses. Key words: bridges, concrete, creep, prestress relaxation, segmental construction, shrinkage, strait crossing.

Microwave Dynamic Dielectric Analysis of Curing Neat Resins

1992 ◽  
Vol 269 ◽  
Author(s):  
Ray J. King ◽  
Michael J. Werner ◽  
Guillermo D. Mayorga
Keyword(s):  
Polymer Matrix Composites ◽  
Mechanical Analysis ◽  
Matrix Composites ◽  
Dielectric Analysis ◽  
Scanning Calorimetry ◽  
Strongly Coupled ◽  
Analysis Techniques ◽  
Noninvasive Sensors ◽  
Prototype Software

ABSTRACTMicrowave reflection resonator sensors have been developed to monitor the dynamic, in situ real and imaginary dielectric components (ε′, ε″) of thermoset polymer matrix composites and thermoplastics. These reusable and noninvasive sensors are conformably mounted in the autoclave mold in such a manner that the EM fields are strongly coupled to the resin. Tracking of (ε′, ε″) during the cure provides information about the chemical kinetics such as timing the point of minimum viscosity and monitoring the relative cure index. The sensor is readily adjustable for optimum coupling to the type of material being tested and is rated for temperatures up to 250°C (480*F). The technique is complementary to other analysis techniques such as Differential Scanning Calorimetry (DSC) and Dynamic Mechanical Analysis (DMA). A prototype software and electronics package has been developed to support the sensor.

scholarly journals Stepwise chemical abrasion ID-TIMS-TEA of microfractured Hadean zircon

2019 ◽  
Author(s):  
C. Brenhin Keller ◽  
Patrick Boehnke ◽  
Blair Schoene ◽  
T. Mark Harrison
Keyword(s):  
Mass Spectrometry ◽  
High Spatial Resolution ◽  
Ionization Mass ◽  
Zircon Population ◽  
Temporal Precision ◽  
Analysis Techniques ◽  
Secondary Ionization Mass Spectrometry ◽  
Jack Hills ◽  
Terrestrial Material

Abstract. The Hadean Jack Hills zircons represent the oldest known terrestrial material, providing a unique and truly direct record of Hadean Earth history. This zircon population has been extensively studied via high spatial resolution, high throughput in situ isotopic and elemental analysis techniques such as secondary ionization mass spectrometry (SIMS), but not by comparatively destructive, high-temporal-precision (

scholarly journals Progress in Microanalysis

2013 ◽  
Vol 21 (3) ◽  
pp. 7-7
Author(s):  
Charles Lyman
Keyword(s):  
Light Microscopy ◽  
Spatial Resolution ◽  
Equilibrium Phase ◽  
X Ray Diffraction ◽  
Bulk Analysis ◽  
X Ray ◽  
Analysis Techniques ◽  
Composition And Structure

Many researchers view microanalysis as the determination of composition and structure of individual phases at a spatial resolution of 1 μm or better. It is remarkable to me that much of what we know about the phases shown in equilibrium phase diagrams was determined using bulk analysis techniques like powder X-ray diffraction in combination with light microscopy of flat-polished sections of materials. The identities and amounts of phases were deduced from systematic experiments because there was no way to analyze micrometer-sized phases in situ.

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