Advanced CD-SEM metrology for qualification of DSA patterns using coordinated line epitaxy (COOL) process
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1992 ◽
Vol 71
(8)
◽
pp. 350-355
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2013 ◽
Vol 690-693
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pp. 2659-2663
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1990 ◽
Vol 55
(4)
◽
pp. 1029-1032
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