Silicon membrane gyroscope with electrostatic actuation and sensing

1995 ◽  
Author(s):  
David Wood ◽  
George Cooper ◽  
James S. Burdess ◽  
Alun J. Harris ◽  
Jane L. Cruickshank
Keyword(s):  
Electrostatic Actuation ◽  
Silicon Membrane

Strain measurement by means of bend contour microscopy

1989 ◽  
Vol 47 ◽  
pp. 210-211
Author(s):  
Philip D. Hren
Keyword(s):  
Strain Measurement ◽  
Large Angle ◽  
Single Crystal Silicon ◽  
Convergent Beam Electron Diffraction ◽  
Zone Axis ◽  
Silicon Membrane ◽  
Crystal Silicon ◽  
Contour Pattern ◽  
Convergent Beam ◽  
Low Symmetry

The pattern of bend contours which appear in the TEM image of a bent or curled sample indicates the shape into which the specimen is bent. Several authors have characterized the shape of their bent foils by this method, most recently I. Bolotov, as well as G. Möllenstedt and O. Rang in the early 1950’s. However, the samples they considered were viewed at orientations away from a zone axis, or at zone axes of low symmetry, so that dynamical interactions between the bend contours did not occur. Their calculations were thus based on purely geometric arguments. In this paper bend contours are used to measure deflections of a single-crystal silicon membrane at the (111) zone axis, where there are strong dynamical effects. Features in the bend contour pattern are identified and associated with a particular angle of bending of the membrane by reference to large-angle convergent-beam electron diffraction (LACBED) patterns.

Optimized electrochemical breakdown etching using temporal voltage variation for formation of nanopores in a silicon membrane

2020 ◽  
pp. 129323
Author(s):  
Nguyen Xuan Chung ◽  
Hithesh Kumar Gatty ◽  
Xi Lu ◽  
Miao Zhang ◽  
Jan Linnros
Keyword(s):  
Silicon Membrane ◽  
Voltage Variation

Porous silicon membrane-modified electrodes for label-free voltammetric detection of MS2 bacteriophage

2016 ◽  
Vol 80 ◽  
pp. 47-53 ◽  
Author(s):  
Nekane Reta ◽  
Andrew Michelmore ◽  
Christopher Saint ◽  
Beatriz Prieto-Simón ◽  
Nicolas H. Voelcker
Keyword(s):  
Porous Silicon ◽  
Modified Electrodes ◽  
Label Free ◽  
Silicon Membrane ◽  
Ms2 Bacteriophage ◽  
Voltammetric Detection

scholarly journals A Structure−Permeability Relationship of Ultrathin Nanoporous Silicon Membrane:  A Comparison with the Nuclear Envelope

2008 ◽  
Vol 130 (13) ◽  
pp. 4230-4231 ◽  
Author(s):  
Eunkyoung Kim ◽  
Hui Xiong ◽  
Christopher C. Striemer ◽  
David Z. Fang ◽  
Philippe M. Fauchet ◽  
...  
Keyword(s):  
Nuclear Envelope ◽  
Silicon Membrane ◽  
Nanoporous Silicon ◽  
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