Variations in programmed phase defect size and its impact on defect detection signal intensity using at-wavelength inspection system
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2015 ◽
Vol 14
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pp. 013502
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2007 ◽
Vol 126
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pp. 054502
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1987 ◽
Vol 64
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pp. 103-105
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1996 ◽
Vol 30
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pp. 567-570
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