Sensitivity analysis for high accuracy proximity effect correction

2015 ◽  
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Xaver Thrun ◽  
Clyde Browning ◽  
Kang-Hoon Choi ◽  
Thiago Figueiro ◽  
Christoph Hohle ◽  
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Sensitivity Analysis ◽  
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Proximity Effect Correction

Proximity effect correction sensitivity analysis

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Sensitivity Analysis ◽  
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Vol 46 (2) ◽  
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Yoshiaki Hattori ◽  
Tomohiro Iijima ◽  
Hirohito Anze ◽  
Susumu Oogi ◽  
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Proximity Effect ◽  
High Accuracy ◽  
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2020 ◽  
Vol 59 (12) ◽  
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2000 ◽  
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Shinji Kubo ◽  
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Takayuki Iwamatsu ◽  
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1999 ◽  
Vol 17 (6) ◽  
pp. 2860 ◽  
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Eiichi Nomura ◽  
Shoko Manako ◽  
Hideo Kobinata ◽  
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Proximity Effect ◽  
Stencil Mask ◽  
Proximity Effect Correction
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