Large-scale analytical Fourier transform of photomask layouts using graphics processing units
2016 ◽
Vol 32
(2)
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pp. 288-301
2011 ◽
Vol 182
(8)
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pp. 1651-1656
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Keyword(s):
Keyword(s):
2020 ◽
Vol 22
(5)
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pp. 1217-1235
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2013 ◽
Vol 184
(6)
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pp. 1483-1489
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