Influence of temperature difference on surface figure controlling during continuous polishing
2017 ◽
Keyword(s):
2015 ◽
Vol 2015
(0)
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pp. _C133-1_-_C133-2_
Keyword(s):
2012 ◽
Vol 415-416
◽
pp. 734-744
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2014 ◽
Vol 23
(1)
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pp. 68-76
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2010 ◽
Vol 2010
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pp. 189-190