The statistical inverse problem of scatterometry: Bayesian inference and the effect of different priors
2015 ◽
Vol 5
(6)
◽
pp. 511-526
◽
Keyword(s):
2016 ◽
Vol 24
(1)
◽
pp. 54-64
◽
2019 ◽
Vol 10
(2)
◽
pp. 28-35
Keyword(s):