Aspect of glass softening by master mold

1995 ◽  
Author(s):  
Koro Shishido ◽  
Masao Sugiura ◽  
Tetsuo Shoji
Keyword(s):  
Master Mold ◽  
Glass Softening

Fabrication of a negative PMMA master mold for soft-lithography by MeV ion beam lithography

2012 ◽  
Vol 272 ◽  
pp. 149-152 ◽  
Author(s):  
Nitipon Puttaraksa ◽  
Somrit Unai ◽  
Michael W. Rhodes ◽  
Kanda Singkarat ◽  
Harry J. Whitlow ◽  
...  
Keyword(s):  
Soft Lithography ◽  
Ion Beam ◽  
Master Mold ◽  
Ion Beam Lithography

Development of Membrane Micro Embossing (MeME) Process for Self-Supporting Polymer Membrane Microchannel

2005 ◽  
Author(s):  
Masashi Ikeuchi ◽  
Koji Ikuta
Keyword(s):  
Glass Transition ◽  
Transition Temperature ◽  
Polymer Membrane ◽  
Mold Surface ◽  
Thermoplastic Polymer ◽  
Master Mold ◽  
Thin Membrane ◽  
Micro Fabrication ◽  
Micro Scale ◽  
Planar Membrane

In this work, we have successfully fabricated self-supporting polymer membrane microchannels with width of 50μm, depth of 50μm, and wall thickness of ~5μm. To fabricate this self-supporting polymer membrane microchannel, we have developed novel micro fabrication process named “membrane micro embossing (MeME)”. In this process, a thin (~μm) thermoplastic polymer membrane set between a master mold and a deformable support substrate is heated to glass transition temperature, and pressed to fit the membrane onto the mold surface. By heat-sealing the embossed membrane with another planar membrane, we can fabricate sealed membrane microchannels. This membrane microchannel surrounded by only thin membrane walls will provide a powerful platform for micro-scale biological and chemical analysis.

Fabrication of Flexible Interposer Using Printing Method

2020 ◽  
Author(s):  
Atsuhiro Furuta ◽  
Kazuki Honjo ◽  
Jun Taniguchi
Keyword(s):  
Silicon Substrate ◽  
Nanoimprint Lithography ◽  
Printed Electronics ◽  
Electronic Devices ◽  
Master Mold ◽  
Sintering Process ◽  
Silver Ink ◽  
Press Method ◽  
Photolithography Process ◽  
Printing Method

Abstract In recent years, flexible electronic devices such as printed electronics are gathering attention. To make flexible connect between one circuit device and another circuit device, interposer is necessary. However, most of conventional interposers are not flexible, because there are made of silicon or glass substrate. To solve this problem, we have been developed fabrication process of flexible interposer. Master mold was fabricated by photolithography process. First, SU-8 resist was coated on silicon substrate with 5μm thickness. Then, photolithography process was carried out to SU-8 resist. After development, pillar shape master molds with diameters of 10 or 20 μm were obtained. After release coating of master molds, hole patterns for vias were transferred by UV nanoimprint lithography. The obtained hole patterns were diameter of 10 μm or 20 μm, and pitch of 21.0 μm and 40.1 μm, respectively. Next, these holes were filled with silver ink by roll press method. Then, sintering process was carried out to evaporate of solvent of silver ink. After that, flexible interposer was obtained. As a result, we have been succeeded in filling the holes array with silver ink. Obtained interposer vias, which were silver region, were 8.2 μm diameter and 3.3 μm height, or 20.3 μm diameter and 5.3 μm height for 10 mm square size.

Preparation of Light Guide Plates with Micro-Patterned Functional Resin Layers by Using UV Nano-Imprint Process

2014 ◽  
Vol 905 ◽  
pp. 8-11
Author(s):  
Se Yong Park ◽  
Min Ho Sung ◽  
Han Byul Lee ◽  
Seong Eui Lee ◽  
Hee Chul Lee
Keyword(s):  
Stainless Steel ◽  
Light Guide ◽  
Optical Spectra ◽  
Master Mold ◽  
Pmma Substrate ◽  
Color Coordinates ◽  
Nano Imprint ◽  
Micro Patterns

In this study, we fabricated and characterized light guide plates (LGP) with micro-patterned functional resin layers. PVC stamp was hot-embossed by a stainless-steel master mold. Functional resin layers with micro-patterns were also prepared on a PMMA substrate by UV nanoimprint process. Various resins with different refraction indexes were used and the pitch of master mold was varied from 60 to 100 μm. The LGP with 100-μm-spaced PR-58H (n~1.578) resin patterns showed the best luminance of 544 cd/m2, which was improved by 8.6% compared to the bare PMMA substrate. For all functionally patterned samples, the optical spectra with wavelengths were almost identical with that of the bare PMMA, implying little shift of color coordinates by additional resin layers.

A master-mold fabrication by electron beam lithography followed by nanoimprinting and self-aligned double patterning

2014 ◽  
Vol 53 (6S) ◽  
pp. 06JK05 ◽  
Author(s):  
Tsuyoshi Watanabe ◽  
Kouta Suzuki ◽  
Hiromasa Iyama ◽  
Takeshi Kagatsume ◽  
Shuji Kishimoto ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Master Mold ◽  
Mold Fabrication ◽  
Double Patterning

Chrome Mask Design for Microfluidic Fabrication

2013 ◽  
Vol 795 ◽  
pp. 276-280 ◽  
Author(s):  
Veeradasan Perumal ◽  
U. Hashim
Keyword(s):  
Device Fabrication ◽  
Wafer Surface ◽  
Master Mold ◽  
Major Step ◽  
Mask Design ◽  
Alignment Mark ◽  
Conventional Photolithography ◽  
Photolithography Process ◽  
Resolution Requirements ◽  
Chrome Mask

This paper presents a simple and effective method to design chrome mask for microfludic fabrication. Microfluidic fabrication involves 9 major step and mainly depends on the master mold template formation by SU-8 photoresists using conventional photolithography process The chrome mask was design using AutoCAD software. Essentially, mask is a crucial element in a microfluidic fabrication in which resolution requirements and precise alignment are vital, each mask needs to be precisely aligned with original alignment mark. Otherwise, it cant successfully transfer the original pattern to the wafer surface causing microchannel formation failure. Thus, the initial design is compared with the fabricated chrome mask to achieved a better result during device fabrication.

Properties Investigation of Yb3+-Doped Phosphate Glasses for Fiber Laser

2013 ◽  
Vol 573 ◽  
pp. 31-35
Author(s):  
His Wen Yang ◽  
Jin Ming Zhu ◽  
Yu Xiang Tsai ◽  
Chun Hsiung Lin ◽  
Cheng Hsing Hsu ◽  
...  
Keyword(s):  
Refractive Index ◽  
Fluorescence Spectra ◽  
Coefficient Of Thermal Expansion ◽  
Fluorescence Emission ◽  
Softening Temperature ◽  
Chemical Durability ◽  
Phosphate Glasses ◽  
Content Increase ◽  
Glass Softening ◽  
Bridge Oxygen

The physical and optical properties of P2O5-Al2O3-ZnO glasses doped with different concentration of Yb3+ions were investigated. The experimental results indicated that density, chemical durability, glass transition temperature (Tg) and glass softening temperature (Td) of glasses increase with increasing the Yb2O3content of glasses. However, the coefficient of thermal expansion (α) for glasses decrease with increasing the Yb2O3content. From the results of Fourier transform infrared spectroscopy, the numbers of (-P-O-P-) bonds decrease and (-P-O-M+-) bonds increase with increasing the Yb2O3content. Increase of non-bridge oxygen (-P-O-M+-) raise the refractive index of glasses. Moreover, the results of absorption spectra indicate that the absorption peak of glasses are observed at both wavelengths of 916nm and 977nm. As increasing the concentration of Yb2O3, the absorption efficiencies become stronger. In accordance with the results of fluorescence spectra, the fluorescence emission of glasses are detected at wavelengths of 970nm, 995nm, 1020nm and 1048nm, respectively. The intensity of the fluorescence emission peaks significantly decrease at wavelengths of 970nm and 995nm as the concentration of Yb2O3increases. However, the intensity of the fluorescence emission peaks significantly increase at wavelength of 1048nm under the same condition.

scholarly journals A Study on Fabrication Process of Gold Microdisk Arrays by the Direct Imprinting Method Using a PET Film Mold

Crystals ◽  
2021 ◽  
Vol 11 (12) ◽  
pp. 1452
Author(s):  
Potejana Potejanasak
Keyword(s):  
Thin Film ◽  
Quartz Substrate ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Disk Arrays ◽  
Master Mold ◽  
Au Film ◽  
Gold Thin Film ◽  
Pet Film ◽  
Etched Surface

In this study, an efficient nanofabrication process of metal microdisk arrays using direct imprinting was developed. This process was comprised of three steps; sputter etching on the quartz glass substrate, gold thin film deposition on an etched surface of a substrate, and transfer imprinting using a polyethylene terephthalate (PET) film mold on the Au thin film. A new idea to utilize a PET film mold for disk patterning by the nano transfer imprinting was examined. The PET film mold was prepared by thermally embossing the pillar pattern of a master mold on the PET film. The master mold was prepared from a silicon wafer. The PET film mold was used for transfer imprinting on a metal film deposited on a quartz substrate. The experimental results revealed that the PET film mold can effectively form gold micro-disk arrays on the Au film despite the PET film mold being softer than the Au film. This method can control the distribution and orientation of the nano-arrays on the disk. The plasmonic properties of the gold micro-disk arrays are studied and the absorbance spectrum exhibit depends on the distribution and orientation of gold micro-disk patterns. The nano-transfer imprinting technique is useful for fabricating metallic microdisk arrays on substrate as a plasmonic device.

Glass softening kinetics in the limit of high heating rates

2019 ◽  
Vol 150 (9) ◽  
pp. 094508 ◽  
Author(s):  
Ulyana S. Cubeta ◽  
Vlad Sadtchenko
Keyword(s):  
Heating Rates ◽  
High Heating ◽  
Glass Softening
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