Multifunction surface measurement system based on focusing optical stylus interference and confocal image

2015 ◽  
Author(s):  
Fenfen Lin ◽  
Shuling Zhao ◽  
Suping Chang ◽  
Yanling Sun ◽  
Tiebang Xie
Keyword(s):  
Measurement System ◽  
Surface Measurement ◽  
Confocal Image ◽  
Surface Measurement System

Three dimensional micro surface measurement system based on stereomicroscope

2017 ◽  
Vol 38 (2) ◽  
pp. 607-611
Author(s):  
Li Hui ◽  
Zuo Chao ◽  
Hu Yan ◽  
Zhang Minliang
Keyword(s):  
Measurement System ◽  
Three Dimensional ◽  
Surface Measurement ◽  
Surface Measurement System

Study of camera lens effects for a deflectometry surface measurement system: SCOTS

2014 ◽  
Author(s):  
Run Huang ◽  
Peng Su ◽  
Tianquan Su ◽  
Yuejin Zhao ◽  
Weirui Zhao ◽  
...  
Keyword(s):  
Measurement System ◽  
Surface Measurement ◽  
Camera Lens ◽  
Surface Measurement System

A Handheld 3D Surface Measurement System

2021 ◽  
Author(s):  
Abby M. Lindberg ◽  
F. Garrett Reis ◽  
Micah K. Johnson
Keyword(s):  
Measurement System ◽  
Surface Measurement ◽  
3D Surface ◽  
Surface Measurement System

A Confocal Surface Measurement System Having Improved Measurement Accuracy for Rough Surfaces and Measurement Speed

2003 ◽  
Vol 15 (3) ◽  
pp. 331-340 ◽  
Author(s):  
Mitsuhiro Ishihara ◽  
Keyword(s):  
Measurement System ◽  
Measurement Accuracy ◽  
Rough Surfaces ◽  
Reconstruction Algorithm ◽  
Surface Measurement ◽  
Object Surface ◽  
Beam Spot ◽  
Improve Accuracy ◽  
Improved Accuracy ◽  
Surface Measurement System

We discuss a confocal surface measurement system having improved accuracy for rough surfaces and speed. To enhance speed, we propose (1) a novel nonscanning confocal microscope, (2) a fast object surface reconstruction algorithm, and (3) an optical focused plane shift mechanism. The system we developed operates at speeds exceeding a million points per second. To improve accuracy for rough surfaces, we propose optical smoothing using confocal beam spot microscanning. Results of experiments confirmed that the system measures rough surfaces nearly as accurately as smooth surfaces.

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