Phase compensation with fiber optic surface profile acquisition and reconstruction system

2015 ◽  
Author(s):  
En Bo ◽  
Fajie Duan ◽  
Fan Feng ◽  
Changrong Lv ◽  
Fu Xiao ◽  
...  
1982 ◽  
Vol 7 (6) ◽  
pp. 279 ◽  
Author(s):  
A. Dandridge ◽  
A. B. Tveten

2017 ◽  
Vol 17 (22) ◽  
pp. 7448-7454 ◽  
Author(s):  
Tianying Chang ◽  
Jinpeng Lang ◽  
Wei Sun ◽  
Jiandong Chen ◽  
Miao Yu ◽  
...  

2009 ◽  
Author(s):  
Robert Schmitt ◽  
Niels König ◽  
Elisa Manfrin de Araújo

1998 ◽  
Vol 120 (2) ◽  
pp. 359-367 ◽  
Author(s):  
C. Bradley ◽  
J. Bohlmann ◽  
S. Kurada

A fiber optical interferometer system is described for non-contact measurement of surface topography. The system employs a fiber optic guide and lens arrangement that forms an interferometric cavity between the lens front face and the test surface. Changes in the surface topography are manifested as phase changes between the light reflected from the surface and the front face of the lens. An electronic control and data acquisition system converts the phase change into a voltage signal proportional to surface height. The system is calibrated and compared with stylus surface profile measurements performed on a standard set of machined surface samples. Comparison of the amplitude parameter, Ra, shows differences of between 17 percent and 34 percent across the set of samples, whereas, two spatial parameters, frequency and peak count, consistently compare within 1 percent to 12 percent throughout the Ra range: 0.42 μm ≤ Ra ≤ 2.89 μm.


Author(s):  
J. M. Cowley ◽  
R. Glaisher ◽  
J. A. Lin ◽  
H.-J. Ou

Some of the most important applications of STEM depend on the variety of imaging and diffraction made possible by the versatility of the detector system and the serial nature, of the image acquisition. A special detector system, previously described, has been added to our STEM instrument to allow us to take full advantage of this versatility. In this, the diffraction pattern in the detector plane may be formed on either of two phosphor screens, one with P47 (very fast) phosphor and the other with P20 (high efficiency) phosphor. The light from the phosphor is conveyed through a fiber-optic rod to an image intensifier and TV system and may be photographed, recorded on videotape, or stored digitally on a frame store. The P47 screen has a hole through it to allow electrons to enter a Gatan EELS spectrometer. Recently a modified SEM detector has been added so that high resolution (10Å) imaging with secondary electrons may be used in conjunction with other modes.


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