Tailoring design and fabrication of capacitive RF MEMS switches for K-band applications

2015 ◽  
Author(s):  
Fabio Quaranta ◽  
Anna Persano ◽  
Giovanni Capoccia ◽  
Antonietta Taurino ◽  
Adriano Cola ◽  
...  
Keyword(s):  
Rf Mems ◽  
Mems Switches ◽  
Rf Mems Switches ◽  
K Band

K-band MEMS-based frequency adjustable waveguide filters for mobile back-hauling

2016 ◽  
Vol 8 (4-5) ◽  
pp. 751-757 ◽  
Author(s):  
Luca Pelliccia ◽  
Paola Farinelli ◽  
Roberto Sorrentino ◽  
Giandomenico Cannone ◽  
Giulio Favre ◽  
...  
Keyword(s):  
Tuning Range ◽  
Rf Mems ◽  
The Other ◽  
Center Frequency ◽  
Mems Switches ◽  
Rf Mems Switches ◽  
Waveguide Filters ◽  
Adjustable Center ◽  
Filter Prototype ◽  
K Band

This paper presents the first experimental results of a novel MEMS-based waveguide filter for mobile back-hauling at K-band with adjustable center frequency. The tuning concept employs commercial packaged RF MEMS switches, wire-bonded within a rectangular cavity. The switches are used to perturb the current distribution of the TE101 mode so as to tune the resonant frequency of the cavity. A tuning range up to 2% with unloaded Qs of the order of 1000 in K-band can be obtained. A second-order filter prototype employing commercially available MEMS on silicon substrate has been tested. Measurements show a 160 MHz frequency shift (0.7%) and Qs up to 1000 using only one MEMS per resonator. New higher-order prototypes using low-loss substrate MEMS (e.g. quartz) will be fabricated in order to get higher Qs. The concept here present leads to a very simple structure. The number of MEMS per resonator is, in fact, minimized (we use only one MEMS) and the design is simple. On the other hand, the achievable tuning range is lower (<2%) than the other concepts. Higher tuning ranges are achievable using more MEMS, but at the expense of lower Qs of the resonators.

Lifetime characterization of capacitive RF MEMS switches

2005 ◽  
Author(s):  
Afshin Ziaei ◽  
Thierry Dean ◽  
Jean-Philippe Polizzi
Keyword(s):  
Rf Mems ◽  
Mems Switches ◽  
Rf Mems Switches

CMOS Compatible RF MEMS Switches with Serpentine Springs

2019 ◽  
Vol 18 (1) ◽  
pp. 9-14
Author(s):  
Xiao L. Evans ◽  
H.S. Gamble ◽  
P.T. Baine ◽  
S.J.N. Mitchell ◽  
J. Montgomery ◽  
...  
Keyword(s):  
Rf Mems ◽  
Mems Switches ◽  
Rf Mems Switches ◽  
Cmos Compatible

scholarly journals Lifetime characterization of capacitive power RF MEMS switches

2006 ◽  
Author(s):  
Afshin Ziaei ◽  
Thierry Dean ◽  
Yves Mancuso
Keyword(s):  
Rf Mems ◽  
Mems Switches ◽  
Rf Mems Switches

Design and process considerations for fabricating RF MEMS switches on printed circuit boards

2005 ◽  
Vol 14 (6) ◽  
pp. 1311-1322 ◽  
Author(s):  
Hung-Pin Chang ◽  
Jiangyuan Qian ◽  
B.A. Cetiner ◽  
F. De Flaviis ◽  
M. Bachman ◽  
...  
Keyword(s):  
Printed Circuit Boards ◽  
Rf Mems ◽  
Circuit Boards ◽  
Mems Switches ◽  
Printed Circuit ◽  
Rf Mems Switches

A miniaturized reconfigurable broadband attenuator based on RF MEMS switches

2016 ◽  
Vol 26 (7) ◽  
pp. 074002 ◽  
Author(s):  
Xin Guo ◽  
Zhuhao Gong ◽  
Qi Zhong ◽  
Xiaotong Liang ◽  
Zewen Liu
Keyword(s):  
Rf Mems ◽  
Mems Switches ◽  
Rf Mems Switches
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