Low-temperature and damage-free transition metal and magnetic material etching using a new metallic complex reaction
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2014 ◽
Vol 47
(32)
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pp. 322002
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1984 ◽
Vol 106
(3)
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pp. 807-809
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1980 ◽
Vol 41
(C5)
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pp. C5-155-C5-156
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2010 ◽
Vol 66
(6)
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pp. 603-614
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2013 ◽
Vol 33
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pp. 75-77
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