t-Boc protected poly(p-hydroxystyrene-alt-carbon monoxide): a new class of deep-UV resists
2018 ◽
Vol 10
(16)
◽
pp. 13693-13701
◽
Keyword(s):
1963 ◽
Vol 85
(11)
◽
pp. 1626-1628
◽
1952 ◽
Vol 74
(6)
◽
pp. 1509-1515
◽
1954 ◽
Vol 76
(24)
◽
pp. 6394-6399
◽
Keyword(s):
1995 ◽
Vol 53
◽
pp. 232-233
1992 ◽
Vol 50
(1)
◽
pp. 540-541