Low cost of ownership KrF excimer laser using a novel pulse power and chamber configuration

Author(s):  
William N. Partlo ◽  
Richard L. Sandstrom ◽  
Igor V. Fomenkov ◽  
Palash P. Das
2019 ◽  
Vol 963 ◽  
pp. 403-406
Author(s):  
Kaname Imokawa ◽  
Toshifumi Kikuchi ◽  
Kento Okamoto ◽  
Daisuke Nakamura ◽  
Akihiro Ikeda ◽  
...  

We developed a novel KrF excimer laser doping system for 4H-SiC power devices, and demonstrated laser doping of 4H-SiC with Al thin film deposited on the surface. As seen from the results of the Al depth profile, high concentration implantation (~ 1021 cm-3 at the surface) of Al was achieved by laser ablation of the Al thin film. A high, built-in-potential (~3.5 V) of the pn junction diode was clearly seen in the I-V curve. In addition, the contact resistivity of the deposited Al/Ti electrodes on the surface was 1.9 × 10−4 Ωcm2 by TLM (Transmission Line Model). It was confirmed that a high concentration of Al doping and low contact resistivity were achieved by the KrF excimer laser doping system.


1989 ◽  
Vol 28 (Part 1, No. 11) ◽  
pp. 2354-2356
Author(s):  
Yasuhiro Shimada ◽  
Koichi Wani ◽  
Yoshiro Ogata

2002 ◽  
Vol 407 (1-2) ◽  
pp. 126-131 ◽  
Author(s):  
Shin-ichi Aoqui ◽  
Hisatomo Miyata ◽  
Tamiko Ohshima ◽  
Tomoaki Ikegami ◽  
Kenji Ebihara

1988 ◽  
Author(s):  
Hideo Nakagawa ◽  
Masaru Sasago ◽  
Masayuki Endo ◽  
Yushihiko Hirai ◽  
Kazufumi Ogawa ◽  
...  

1990 ◽  
Vol 29 (15) ◽  
pp. 2325 ◽  
Author(s):  
Robert W. Pitz ◽  
Joseph A. Wehrmeyer ◽  
J. M. Bowling ◽  
Tsarng-Sheng Cheng

Energies ◽  
2021 ◽  
Vol 14 (7) ◽  
pp. 1825
Author(s):  
Caiyang Wei ◽  
Theo Hofman ◽  
Esin Ilhan Caarls

For an electric vehicle (EV) with a continuously variable transmission (CVT), a novel convex programming (CP)-based co-design method is proposed to minimize the total-cost-of-ownership (TCO). The integration of the electric machine (EM) and the CVT is the primary focus. The optimized system with co-design reduces the TCO by around 5.9% compared to a non-optimized CVT-based EV (based on off-the-shelf components) and by around 2% compared to the EV equipped with a single-speed transmission (SST). By taking advantage of the control and design freedom provided by the CVT, the optimal CVT, EM and battery sizes are found to reduce the system cost. It simultaneously finds the optimal CVT speed ratio and air-flow rate of the cooling system reducing the energy consumption. The strength of co-design is highlighted by comparing to a sequential design, and insights into the design of a low-power EV that is energy-efficient and cost-effective for urban driving are provided. A highly integrated EM-CVT system, which is efficient, low-cost and lightweight, can be expected for future EV applications.


1994 ◽  
Vol 105 (1-2) ◽  
pp. 133-141 ◽  
Author(s):  
H. Yoshida ◽  
K. Nakamura ◽  
H. Ninomiya ◽  
S. Horiguchi

Sign in / Sign up

Export Citation Format

Share Document