Grazing-incidence small angle x-ray scattering studies of nanoscale polymer gratings

2015 ◽  
Author(s):  
Manolis Doxastakis ◽  
Hyo Seon Suh ◽  
Xuanxuan Chen ◽  
Paulina A. Rincon Delgadillo ◽  
Lingshu Wan ◽  
...  
Keyword(s):  
Small Angle ◽  
Grazing Incidence ◽  
X Ray ◽  
X Ray Scattering ◽  
Polymer Gratings ◽  
Ray Scattering

scholarly journals On the assessment by grazing-incidence small-angle X-ray scattering of replica quality in polymer gratings fabricated by nanoimprint lithography

2014 ◽  
Vol 47 (2) ◽  
pp. 613-618 ◽  
Author(s):  
M. Soccio ◽  
N. Alayo ◽  
I. Martín-Fabiani ◽  
D. R. Rueda ◽  
M. C. García-Gutiérrez ◽  
...  
Keyword(s):  
Small Angle ◽  
Nanoimprint Lithography ◽  
Grazing Incidence ◽  
Effective Length ◽  
X Ray ◽  
X Ray Scattering ◽  
Characteristic Features ◽  
Polymer Gratings ◽  
Ray Scattering

Grazing-incidence small-angle X-ray scattering (GISAXS) can be used to characterize the replica quality of polymer gratings prepared by thermal nanoimprint lithography (NIL). Here it is shown using GISAXS experiments that a series of NIL polymer gratings with different line quality present characteristic features that can be associated with the level of defects per line. Both stamps and NIL polymer gratings exhibit characteristic semicircle-like GISAXS patterns. However NIL polymer gratings with defective lines exhibit GISAXS patterns with an excess of diffuse scattering as compared to those of the corresponding stamps. In a first approach, this effect is attributed to a reduction of the effective length of the lines diffracting coherently as the number of defects per line increases.

A general model for estimating the ordering of mesoporous film by grazing incidence small angle X-ray scattering

2014 ◽  
Vol 115 (20) ◽  
pp. 204311 ◽  
Author(s):  
Nie Zhao ◽  
Chunming Yang ◽  
Qian Zhang ◽  
Xueming Lu ◽  
Yuzhu Wang ◽  
...  
Keyword(s):  
Small Angle ◽  
General Model ◽  
Grazing Incidence ◽  
X Ray ◽  
X Ray Scattering ◽  
Mesoporous Film ◽  
Ray Scattering

Grazing incidence small angle x-ray scattering from free-standing nanostructures

1999 ◽  
Vol 86 (12) ◽  
pp. 6763-6769 ◽  
Author(s):  
Markus Rauscher ◽  
Rogerio Paniago ◽  
Hartmut Metzger ◽  
Zoltan Kovats ◽  
Jan Domke ◽  
...  
Keyword(s):  
Small Angle ◽  
Grazing Incidence ◽  
Free Standing ◽  
X Ray ◽  
X Ray Scattering ◽  
Ray Scattering

Thermal quenching sample chamber for grazing incidence small angle x-ray scattering studies of polymer films

2007 ◽  
Vol 78 (11) ◽  
pp. 113910 ◽  
Author(s):  
M. A. Singh ◽  
M. N. Groves ◽  
M. S. Müller ◽  
I. J. Stahlbrand ◽  
D.-M. Smilgies
Keyword(s):  
Polymer Films ◽  
Small Angle ◽  
Thermal Quenching ◽  
Grazing Incidence ◽  
X Ray ◽  
X Ray Scattering ◽  
Sample Chamber ◽  
Ray Scattering

scholarly journals A grazing incidence small-angle x-ray scattering analysis on capped Ge nanodots in layer structures

2010 ◽  
Vol 22 (47) ◽  
pp. 474003 ◽  
Author(s):  
Hiroshi Okuda ◽  
Masayuki Kato ◽  
Keiji Kuno ◽  
Shojiro Ochiai ◽  
Noritaka Usami ◽  
...  
Keyword(s):  
Small Angle ◽  
Grazing Incidence ◽  
X Ray ◽  
X Ray Scattering ◽  
Layer Structures ◽  
Ray Scattering
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