Spectral analysis of the line-width and line-edge roughness transfer during self-aligned double patterning approach

2015 ◽  
Author(s):  
E. Dupuy ◽  
E. Pargon ◽  
M. Fouchier ◽  
H. Grampeix ◽  
J. Pradelles ◽  
...  
Keyword(s):  
Spectral Analysis ◽  
Line Width ◽  
Line Edge Roughness ◽  
Edge Roughness ◽  
Double Patterning

Resistivity Impact from Modulated Line-Edge-Roughness with Self-aligned Double Patterning

2020 ◽  
Author(s):  
Dewei Xu ◽  
KuangChung Chuang ◽  
Wayne Zhao ◽  
Keith Donegan ◽  
Seung-Yeop Kook ◽  
...  
Keyword(s):  
Line Edge Roughness ◽  
Edge Roughness ◽  
Double Patterning
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