MEMS-based tunable gratings and their applications

2015 ◽  
Author(s):  
Yiting Yu ◽  
Weizheng Yuan ◽  
Dayong Qiao
Keyword(s):  
Tunable Gratings

scholarly journals Analog Piezoelectric-Driven Tunable Gratings With Nanometer Resolution

2004 ◽  
Vol 13 (6) ◽  
pp. 998-1005 ◽  
Author(s):  
C.W. Wong ◽  
Y. Jeon ◽  
G. Barbastathis ◽  
S.-G. Kim
Keyword(s):  
Nanometer Resolution ◽  
Tunable Gratings

Extending the Alvarez-Lens Concept to Arbitrary Optical Devices: Tunable Gratings, Lenses, and Spiral Phase Plates

2017 ◽  
Vol 7 (3) ◽  
pp. 320-325 ◽  
Author(s):  
Stefan F. Busch ◽  
Jan C. Balzer ◽  
George Bastian ◽  
Graham E. Town ◽  
Martin Koch
Keyword(s):  
Optical Devices ◽  
Phase Plates ◽  
Tunable Gratings ◽  
Spiral Phase

Design, Dynamics and Active Control of Micro Interferometers for Low Noise Parallel Operation

2008 ◽  
Author(s):  
Omkar Karhade ◽  
Levent Degertekin ◽  
Thomas Kurfess
Keyword(s):  
Noise Reduction ◽  
Range Of Motion ◽  
Active Control ◽  
Control Algorithm ◽  
Cutoff Frequency ◽  
Low Noise ◽  
Experimental Results ◽  
Ambient Vibration ◽  
Limited Range Of Motion ◽  
Tunable Gratings

Micromachined Scanning Grating Interferometer (μSGI) array offers a viable solution to the high resolution, large bandwidth, non-contact and high throughput metrology. Parallel active control of μSGIs is necessary to reduce the effect of positioning errors and ambient vibration noise. To achieve individual control of the μSGIs, the gratings in the μSGI are micromachined on Silicon membranes, which can be electrostatically actuated. These tunable gratings are designed to have sufficient range of motion (∼400nm) and sufficient bandwidth (∼50kHz) for effective noise reduction. The tunable gratings are fabricated successfully using Silicon on Insulator wafers with a two mask process. A novel recurrent calibration based control algorithm is designed to actively control the tunable gratings. The novel algorithm is implemented digitally using FPGA on an array of μSGIs simultaneously. The algorithm compensates for the non-linearities of the actuator and problem due to limited range of motion. A system model is built to design and analyze the control algorithm and is verified by experimental results. Experimental results show 100 times noise reduction at low frequencies and 6.5kHz noise reduction cutoff frequency. A resolution of 1×10−4 nmrms/√Hz is achieved by implementation of this algorithm on μSGI.

scholarly journals Optically Tunable Gratings Based on Coherent Population Oscillation

2018 ◽  
Vol 8 (1) ◽  
Author(s):  
Xiao-Jun Zhang ◽  
Hai-Hua Wang ◽  
Lei Wang ◽  
Jin-Hui Wu
Keyword(s):  
Tunable Gratings ◽  
Population Oscillation ◽  
Coherent Population Oscillation

Dynamic wavelength selective add/drop node comprising tunable gratings

1997 ◽  
Vol 33 (10) ◽  
pp. 881 ◽  
Author(s):  
H. Okayama ◽  
Y. Ozeki ◽  
T. Kunii
Keyword(s):  
Tunable Gratings

scholarly journals Analog Tunable Gratings with Nanometer Resolution

2002 ◽  
Author(s):  
C.W. Wong ◽  
W.-C. Shih ◽  
Y.B. Jeon ◽  
S. Desai ◽  
D. Freeman ◽  
...  
Keyword(s):  
Nanometer Resolution ◽  
Tunable Gratings

Analog tunable gratings driven by thin-film piezoelectric microelectromechanical actuators

2003 ◽  
Vol 42 (4) ◽  
pp. 621 ◽  
Author(s):  
Chee Wei Wong ◽  
Yongbae Jeon ◽  
George Barbastathis ◽  
Sang-Gook Kim
Keyword(s):  
Thin Film ◽  
Tunable Gratings

MEMS tunable gratings with analog actuation

2003 ◽  
Vol 149 (1-3) ◽  
pp. 31-40 ◽  
Author(s):  
W Shih
Keyword(s):  
Tunable Gratings

scholarly journals Tunable gratings in a hollow-core photonic bandgap fiber based on acousto-optic interaction

2009 ◽  
Vol 17 (12) ◽  
pp. 9933 ◽  
Author(s):  
Dong-Il Yeom ◽  
Hyun Chul Park ◽  
In Kag Hwang ◽  
Byoung Yoon Kim
Keyword(s):  
Photonic Bandgap ◽  
Hollow Core ◽  
Acousto Optic Interaction ◽  
Photonic Bandgap Fiber ◽  
Tunable Gratings
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