Quantitative tabletop coherent diffraction imaging microscope for EUV lithography mask inspection

2014 ◽  
Author(s):  
Bosheng Zhang ◽  
Daniel E. Adams ◽  
Matthew D. Seaberg ◽  
Dennis F. Gardner ◽  
Elisabeth R. Shanblatt ◽  
...  
Keyword(s):  
Coherent Diffraction Imaging ◽  
Euv Lithography ◽  
Diffraction Imaging ◽  
Mask Inspection

scholarly journals Effects of the illumination NA on EUV mask inspection with coherent diffraction imaging

2020 ◽  
Author(s):  
Ricarda Nebling ◽  
Hyun-Su Kim ◽  
Uldis Locans ◽  
Atoosa Dejkameh ◽  
Yasin Ekinci ◽  
...  
Keyword(s):  
Coherent Diffraction Imaging ◽  
Diffraction Imaging ◽  
Mask Inspection

Electrochemically Induced Strain Evolution in Pt–Ni Alloy Nanoparticles Observed by Bragg Coherent Diffraction Imaging

Nano Letters ◽  
2021 ◽  
Author(s):  
Tomoya Kawaguchi ◽  
Vladimir Komanicky ◽  
Vitalii Latyshev ◽  
Wonsuk Cha ◽  
Evan R. Maxey ◽  
...  
Keyword(s):  
Alloy Nanoparticles ◽  
Strain Evolution ◽  
Coherent Diffraction Imaging ◽  
Ni Alloy ◽  
Diffraction Imaging

scholarly journals Complex wavefront sensing based on coherent diffraction imaging using vortex modulation

2021 ◽  
Vol 11 (1) ◽  
Author(s):  
Rujia Li ◽  
Liangcai Cao
Keyword(s):  
Phase Retrieval ◽  
Dynamic Range ◽  
A Priori ◽  
Measured Intensity ◽  
Physical Constraints ◽  
Coherent Diffraction Imaging ◽  
Effective Dynamic ◽  
Ill Posed ◽  
Retrieval Problem ◽  
Diffraction Imaging

AbstractPhase retrieval seeks to reconstruct the phase from the measured intensity, which is an ill-posed problem. A phase retrieval problem can be solved with physical constraints by modulating the investigated complex wavefront. Orbital angular momentum has been recently employed as a type of reliable modulation. The topological charge l is robust during propagation when there is atmospheric turbulence. In this work, topological modulation is used to solve the phase retrieval problem. Topological modulation offers an effective dynamic range of intensity constraints for reconstruction. The maximum intensity value of the spectrum is reduced by a factor of 173 under topological modulation when l is 50. The phase is iteratively reconstructed without a priori knowledge. The stagnation problem during the iteration can be avoided using multiple topological modulations.

Experimental demonstration of coupled multi-peak Bragg coherent diffraction imaging with genetic algorithms

2021 ◽  
Vol 103 (21) ◽  
Author(s):  
Matthew J. Wilkin ◽  
Siddharth Maddali ◽  
Stephan O. Hruszkewycz ◽  
Anastasios Pateras ◽  
Richard L. Sandberg ◽  
...  
Keyword(s):  
Genetic Algorithms ◽  
Experimental Demonstration ◽  
Coherent Diffraction Imaging ◽  
Diffraction Imaging

High-resolution multi-planar coherent diffraction imaging with multimode fiber source

2021 ◽  
Vol 140 ◽  
pp. 106530
Author(s):  
Yuanyuan Liu ◽  
Qingwen Liu ◽  
You Li ◽  
Junyong Zhang ◽  
Zuyuan He
Keyword(s):  
High Resolution ◽  
Multimode Fiber ◽  
Coherent Diffraction Imaging ◽  
Diffraction Imaging

Enhanced high-speed coherent diffraction imaging

2011 ◽  
Author(s):  
Jonathan Potier ◽  
Sebastien Fricker ◽  
Mourad Idir
Keyword(s):  
High Speed ◽  
Coherent Diffraction Imaging ◽  
Diffraction Imaging

scholarly journals Strain annealing of SiC nanoparticles revealed through Bragg coherent diffraction imaging for quantum technologies

2018 ◽  
Vol 2 (8) ◽  
Author(s):  
S. O. Hruszkewycz ◽  
S. Maddali ◽  
C. P. Anderson ◽  
W. Cha ◽  
K. C. Miao ◽  
...  
Keyword(s):  
Sic Nanoparticles ◽  
Coherent Diffraction Imaging ◽  
Diffraction Imaging

scholarly journals A high-pressure cryocooling method for protein crystals and biological samples with reduced background X-ray scatter

2012 ◽  
Vol 46 (1) ◽  
pp. 234-241 ◽  
Author(s):  
Chae Un Kim ◽  
Jennifer L. Wierman ◽  
Richard Gillilan ◽  
Enju Lima ◽  
Sol M. Gruner
Keyword(s):  
High Pressure ◽  
Biological Samples ◽  
Protein Crystal ◽  
High Background ◽  
X Ray ◽  
Coherent Diffraction Imaging ◽  
X Ray Scattering ◽  
Alternative Method ◽  
Helium Gas ◽  
Diffraction Imaging

High-pressure cryocooling has been developed as an alternative method for cryopreservation of macromolecular crystals and successfully applied for various technical and scientific studies. The method requires the preservation of crystal hydration as the crystal is pressurized with dry helium gas. Previously, crystal hydration was maintained either by coating crystals with a mineral oil or by enclosing crystals in a capillary which was filled with crystallization mother liquor. These methods are not well suited to weakly diffracting crystals because of the relatively high background scattering from the hydrating materials. Here, an alternative method of crystal hydration, called capillary shielding, is described. The specimen is kept hydratedviavapor diffusion in a shielding capillary while it is being pressure cryocooled. After cryocooling, the shielding capillary is removed to reduce background X-ray scattering. It is shown that, compared to previous crystal-hydration methods, the new hydration method produces superior crystal diffraction with little sign of crystal damage. Using the new method, a weakly diffracting protein crystal may be properly pressure cryocooled with little or no addition of external cryoprotectants, and significantly reduced background scattering can be observed from the resulting sample. Beyond the applications for macromolecular crystallography, it is shown that the method has great potential for the preparation of noncrystalline hydrated biological samples for coherent diffraction imaging with future X-ray sources.

scholarly journals Bragg coherent diffraction imaging of iron diffusion into gold nanocrystals

2018 ◽  
Vol 20 (11) ◽  
pp. 113026 ◽  
Author(s):  
Ana Katrina C Estandarte ◽  
Christopher Michael Lynch ◽  
Marianne Monteforte ◽  
Jonathan Rawle ◽  
Chris Nicklin ◽  
...  
Keyword(s):  
Gold Nanocrystals ◽  
Coherent Diffraction Imaging ◽  
Iron Diffusion ◽  
Diffraction Imaging
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