Removal of highly crosslinked resists and hybrid polymers for single micro parts fabrication and nanoimprint stamp rework

2014 ◽  
Author(s):  
Anja Voigt ◽  
Rainer Engelke ◽  
Gisela Ahrens ◽  
Franziska Bullerjahn ◽  
Arne Schleunitz ◽  
...  
Keyword(s):  
Hybrid Polymers ◽  
Micro Parts ◽  
Parts Fabrication

Grid Method for Accuracy Study of Micro Parts Manufacturing

2011 ◽  
Vol 3 (3) ◽  
pp. 263-269 ◽  
Author(s):  
E. Minev ◽  
K. Popov ◽  
R. Minev ◽  
S. Dimov ◽  
V. Gagov
Keyword(s):  
Grid Method ◽  
Micro Parts ◽  
Accuracy Study ◽  
Parts Manufacturing

scholarly journals Nucleation of Hybrid Polymers in Sickle Cell Disease

2011 ◽  
Vol 100 (3) ◽  
pp. 541a
Author(s):  
Donna Yosmanovich ◽  
Alexey Aprelev ◽  
Maria Rotter ◽  
Frank Ferrone
Keyword(s):  
Sickle Cell Disease ◽  
Sickle Cell ◽  
Cell Disease ◽  
Hybrid Polymers

Development and characterization of AISI 316L micro parts produced by metal powder hot embossing

2021 ◽  
Vol 113 (1-2) ◽  
pp. 407-417
Author(s):  
Omid Emadinia ◽  
Maria Teresa Vieira ◽  
Manuel Fernando Vieira
Keyword(s):  
Metal Powder ◽  
Hot Embossing ◽  
Aisi 316L ◽  
Micro Parts

scholarly journals 1D and 2D hybrid polymers based on zinc phenylphosphates: synthesis, characterization and applications in electroactive materials

RSC Advances ◽  
2021 ◽  
Vol 11 (14) ◽  
pp. 7873-7885
Author(s):  
Maciej Dębowski ◽  
Zbigniew Florjańczyk ◽  
Andrzej Ostrowski ◽  
Piotr A. Guńka ◽  
Janusz Zachara ◽  
...  
Keyword(s):  
Smart Materials ◽  
Nano Particles ◽  
Hybrid Polymers ◽  
Electroactive Materials ◽  
Electrically Conducting

Electrically conducting or electroresponsive smart materials derived from newly synthesized and characterized 1D/2D (nano)particles of zinc phenylphosphates are reported.

In situ construction of phenanthroline-based cationic radical porous hybrid polymers for metal-free heterogeneous catalysis

2021 ◽  
Vol 9 (12) ◽  
pp. 7556-7565
Author(s):  
Guojian Chen ◽  
Yadong Zhang ◽  
Ke Liu ◽  
Xiaoqing Liu ◽  
Lei Wu ◽  
...  
Keyword(s):  
Heterogeneous Catalysis ◽  
Heterogeneous Catalysts ◽  
Hybrid Polymers ◽  
Metal Free ◽  
Oxidation Of Sulfides

Constructing phenanthroline-based cationic radical porous hybrid polymers as versatile metal-free heterogeneous catalysts for both oxidation of sulfides and CO2 conversion.

Thermoplastic Silsesquioxane Hybrid Polymers with a Local Ladder-Type Structure

2021 ◽  
Vol 54 (8) ◽  
pp. 3873-3885
Author(s):  
Svenja Pohl ◽  
Oliver Janka ◽  
Ekkehard Füglein ◽  
Guido Kickelbick
Keyword(s):  
Type Structure ◽  
Hybrid Polymers

Manufacture of High Aspect Ratio Bulk Titanium Micro-Parts by Inductively Coupled Plasma Etching

2008 ◽  
Author(s):  
Gang Zhao ◽  
Qiong Shu ◽  
Yue Li ◽  
Jing Chen
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Inductively Coupled Plasma ◽  
Etching Rate ◽  
Sidewall Roughness ◽  
Inductively Coupled ◽  
Icp Etching ◽  
Novel Technology ◽  
Micro Parts ◽  
Etching Mask

A novel technology is developed to fabricate high aspect ratio bulk titanium micro-parts by inductively coupled plasma (ICP) etching. An optimized etching rate of 0.9 μm/min has been achieved with an aspect ratio higher than 10:1. For the first time, SU-8 is used as titanium etching mask instead of the traditional hard mask such as TiO2 or SiO2. With an effective selectivity of 3 and a spun-on thickness beyond 100 μm, vertical etching sidewall and low sidewall roughness are obtained. Ultra-deep titanium etching up to 200 μm has been realized, which is among the best of the present reports. Titanium micro-springs and planks are successfully fabricated with this approach.

Self-assembly of micro parts on normal glass substrate *

2004 ◽  
Vol 14 (10) ◽  
pp. 934-936
Author(s):  
Jiangang Zhang ◽  
Shanhong Xia ◽  
Shaofeng Chen ◽  
Mei Liu ◽  
Hongguang Sun ◽  
...  
Keyword(s):  
Self Assembly ◽  
Glass Substrate ◽  
Micro Parts
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