A bi-material microbeam based thermal actuator for out-of-plane rotation
2020 ◽
Vol 146
(4)
◽
pp. 04020029
Keyword(s):
Keyword(s):
2003 ◽
Vol 103
(1-2)
◽
pp. 48-58
◽
2018 ◽
Vol 15
(4)
◽
pp. 502-509
◽
Keyword(s):