Development of narrow-linewidth Yb- and Er- fiber lasers and frequency mixing for ArF excimer laser seeding

2014 ◽  
Author(s):  
Hongwen Xuan ◽  
Zhigang Zhao ◽  
Hironori Igarashi ◽  
Shinji Ito ◽  
Kouji Kakizaki ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Fiber Lasers ◽  
Narrow Linewidth ◽  
Arf Excimer Laser ◽  
Frequency Mixing

scholarly journals 300-mW narrow-linewidth deep-ultraviolet light generation at 193 nm by frequency mixing between Yb-hybrid and Er-fiber lasers

2015 ◽  
Vol 23 (8) ◽  
pp. 10564 ◽  
Author(s):  
Hongwen Xuan ◽  
Zhigang Zhao ◽  
Hironori Igarashi ◽  
Shinji Ito ◽  
Kouji Kakizaki ◽  
...  
Keyword(s):  
Ultraviolet Light ◽  
Fiber Lasers ◽  
Narrow Linewidth ◽  
Deep Ultraviolet ◽  
Light Generation ◽  
193 Nm ◽  
Frequency Mixing

Narrow-linewidth tunable ArF* excimer-laser source

1981 ◽  
Vol 17 (12) ◽  
pp. 2434-2434
Author(s):  
J. White ◽  
J. Bokor ◽  
R. Freeman
Keyword(s):  
Excimer Laser ◽  
Laser Source ◽  
Narrow Linewidth ◽  
Arf Excimer Laser

Narrow-linewidth tunable ArF* excimer- laser source

1981 ◽  
Author(s):  
J. C. White ◽  
J. Bokor ◽  
R. R. Freeman
Keyword(s):  
Excimer Laser ◽  
Laser Source ◽  
Narrow Linewidth ◽  
Arf Excimer Laser

High Resolution Displacement of Functional Groups onto Fluorocarbon Resin Surface by Using ArF Excimer Laser

1996 ◽  
Vol 451 ◽  
Author(s):  
T. Shimizu ◽  
M. Murahara
Keyword(s):  
Contact Angle ◽  
High Resolution ◽  
Laser Beam ◽  
Thin Layer ◽  
Functional Groups ◽  
Excimer Laser ◽  
Laser Fluence ◽  
Large Area ◽  
Three Solutions ◽  
Arf Excimer Laser

ABSTRACTA Fluorocarbon resin surface was selectively modified by irradiation with a ArF laser beam through a thin layer of NaAlO2, B(OH)3, or H2O solution to give a hydrophilic property. As a result, with low fluence, the surface was most effectively modified with the NaAlO2 solution among the three solutions. However, the contact angle in this case changed by 10 degrees as the fluence changed only 1mJ/cm2. When modifying a large area of the surface, high resolution displacement could not be achieved because the laser beam was not uniform in displacing functional groups. Thus, the laser fluence was successfully made uniform by homogenizing the laser beam; the functional groups were replaced on the fluorocarbon resin surface with high resolution, which was successfully modified to be hydrophilic by distributing the laser fluence uniformly.

Characterization of GaAs surfaces treated with phosphine gas photodecomposed by an ArF excimer laser

1998 ◽  
Vol 72 (12) ◽  
pp. 1472-1474 ◽  
Author(s):  
Takashi Sugino ◽  
Hideaki Ninomiya ◽  
Junji Shirafuji ◽  
Koichiro Matsuda
Keyword(s):  
Excimer Laser ◽  
Arf Excimer Laser
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