Microstructuring of resist double layers by a femtosecond laser ablation and UV lithography hybrid process

2014 ◽  
Author(s):  
Tamara Pacher ◽  
Adrian Prinz ◽  
Sandra Stroj ◽  
Stefan Partel
Keyword(s):  
Laser Ablation ◽  
Femtosecond Laser ◽  
Femtosecond Laser Ablation ◽  
Double Layers ◽  
Hybrid Process ◽  
Uv Lithography

scholarly journals Nanoscale-Precision Removal of Copper in Integrated Circuits Based on a Hybrid Process of Plasma Oxidation and Femtosecond Laser Ablation

Micromachines ◽  
2021 ◽  
Vol 12 (10) ◽  
pp. 1188
Author(s):  
Shuai Wang ◽  
Yaoyu Wang ◽  
Shizhuo Zhang ◽  
Lingfeng Wang ◽  
Shuai Chen ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Integrated Circuits ◽  
Femtosecond Laser ◽  
Copper Oxide ◽  
Ablation Threshold ◽  
Femtosecond Laser Ablation ◽  
Hybrid Process ◽  
Plasma Oxidation ◽  
Fs Laser ◽  
Application Potential

Copper (Cu) is the main interconnect conductor for integrated circuits (IC), and its processing quality is very important to device performance. Herein, a hybrid process of plasma oxidation and femtosecond laser (fs-laser) ablation was proposed for the nanoscale precision removal of Cu in integrated circuits. In this hybrid process, the surface layer of Cu was oxidized to the copper oxide by plasma oxidation, and then the fs-laser with a laser fluence lower than the Cu ablation threshold was used to remove the copper oxide without damaging the underlying Cu. Theoretically, the surface temperature evolutions of Cu and copper oxide under the femtosecond laser were studied by the two-temperature model, and it was revealed that the ablation threshold of copper oxide is much lower than that of Cu. The experimental results showed that the ablation threshold of copper oxide is lower than that of Cu, which is consistent with the theoretical analysis. Using the hybrid process, a surface roughness of 3 nm and a removal accuracy of 4 nm were obtained in the process of Cu film processing, which were better than those obtained by fs-laser ablation. This demonstrated that the hybrid process has good application potential in the field of copper micromachining.

scholarly journals Ridge waveguide lasers in Nd:GGG crystals produced by swift carbon ion irradiation and femtosecond laser ablation

2012 ◽  
Vol 20 (9) ◽  
pp. 9763 ◽  
Author(s):  
Yuechen Jia ◽  
Ningning Dong ◽  
Feng Chen ◽  
Javier R. Vázquez de Aldana ◽  
Sh. Akhmadaliev ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Femtosecond Laser ◽  
Ion Irradiation ◽  
Femtosecond Laser Ablation ◽  
Ridge Waveguide ◽  
Carbon Ion ◽  
Waveguide Lasers ◽  
Ridge Waveguide Lasers

scholarly journals In-situ determination of antimony isotope ratios in Sb minerals by femtosecond LA-MC-ICP-MS

2021 ◽  
Author(s):  
Andreas Benjamin Kaufmann ◽  
Marina Lazarov ◽  
Stefan Kiefer ◽  
Juraj Majzlan ◽  
Stefan Weyer
Keyword(s):  
Laser Ablation ◽  
Femtosecond Laser ◽  
Femtosecond Laser Ablation ◽  
Isotope Ratios ◽  
Icp Ms

Here we present a method for in-situ determination of stable antimony (Sb) isotope compositions by ultraviolet (UV)-femtosecond-laser-ablation-multi-collector-ICP-MS (fs-LA-MC-ICP-MS). Metallic antimony and a number of Sb minerals (stibnite, senarmontite, chalcostibite, tetrahedrite,...

scholarly journals Long-Distance Signals Are Required for Morphogenesis of the Regenerating Xenopus Tadpole Tail, as Shown by Femtosecond-Laser Ablation

PLoS ONE ◽  
2011 ◽  
Vol 6 (9) ◽  
pp. e24953 ◽  
Author(s):  
Jessica P. Mondia ◽  
Michael Levin ◽  
Fiorenzo G. Omenetto ◽  
Ryan D. Orendorff ◽  
Mary Rose Branch ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Femtosecond Laser ◽  
Femtosecond Laser Ablation ◽  
Long Distance ◽  
Xenopus Tadpole ◽  
Tadpole Tail
Sign in / Sign up

Export Citation Format

Share Document