Four-step spatial phase-shifting lateral shearing interferometry by a crossed grating and a linear grating

2013 ◽  
Author(s):  
Zhen-yan Guo ◽  
Yang Song ◽  
Jia Wang ◽  
Zhenhua Li ◽  
An-zhi He
Keyword(s):  
Phase Shifting ◽  
Shearing Interferometry ◽  
Spatial Phase ◽  
Lateral Shearing ◽  
Lateral Shearing Interferometry

Two-step spatial phase-shifting lateral shearing interferometry by triple gratings

2014 ◽  
Vol 323 ◽  
pp. 110-118 ◽  
Author(s):  
Zhenyan Guo ◽  
Yang Song ◽  
Jia Wang ◽  
Zhenhua Li ◽  
Anzhi He
Keyword(s):  
Phase Shifting ◽  
Shearing Interferometry ◽  
Spatial Phase ◽  
Lateral Shearing ◽  
Lateral Shearing Interferometry

scholarly journals An 11-frame phase shifting algorithm in lateral shearing interferometry

2013 ◽  
Vol 21 (23) ◽  
pp. 28325 ◽  
Author(s):  
Chao Fang ◽  
Yang Xiang ◽  
Keqi Qi ◽  
Chunlei Zhang ◽  
Changsong Yu
Keyword(s):  
Phase Shifting ◽  
Shearing Interferometry ◽  
Lateral Shearing ◽  
Lateral Shearing Interferometry

Study on Measurement of Thin Film Thickness with Lateral Shearing Interferometry

2013 ◽  
Vol 718-720 ◽  
pp. 848-852
Author(s):  
Jun Hong Su ◽  
Ying Shi ◽  
Jin Man Ge
Keyword(s):  
Film Thickness ◽  
Transform Method ◽  
Shearing Interferometry ◽  
Platform Process ◽  
Fast Fourier Transform Method ◽  
Lateral Shearing ◽  
Phase Unwrap ◽  
Technical Indicator ◽  
Lateral Shearing Interferometry ◽  
Shearing Interference

The film thickness is an important technical indicator of film devices, and its accuracy directly affects various performances of optical components. In fabrication process of film device, fast and accurate measurement of film thickness has positive significance on product quality control. In this paper, measure film thickness with lateral shearing interferometry. Collect interferograms through structured lateral shearing interference platform, process interferogram with Fast Fourier Transform method to extract phase, unwrap the wrapped phase to achieve phase value. Finally, calculate film thickness based on lateral shearing interference principle. The thickness of sample is 119.6800nm measured by this method, basically the same with the result 120.6036nm that measured by ZYGO interferometer. This experiment shows that lateral shearing interferometry not only suit to measurement of film thickness, but also abundant high-precision method of measuring film thickness, and has high practical value.

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