Study of the impact of gas temperature and pressure on image quality of lithography objective lens

2013 ◽  
Author(s):  
Chao Zhou ◽  
Tingwen Xing
Author(s):  
K. Shibatomi ◽  
T. Yamanoto ◽  
H. Koike

In the observation of a thick specimen by means of a transmission electron microscope, the intensity of electrons passing through the objective lens aperture is greatly reduced. So that the image is almost invisible. In addition to this fact, it have been reported that a chromatic aberration causes the deterioration of the image contrast rather than that of the resolution. The scanning electron microscope is, however, capable of electrically amplifying the signal of the decreasing intensity, and also free from a chromatic aberration so that the deterioration of the image contrast due to the aberration can be prevented. The electrical improvement of the image quality can be carried out by using the fascionating features of the SEM, that is, the amplification of a weak in-put signal forming the image and the descriminating action of the heigh level signal of the background. This paper reports some of the experimental results about the thickness dependence of the observability and quality of the image in the case of the transmission SEM.


2021 ◽  
Vol 15 ◽  
pp. 174830262110080
Author(s):  
Changjun Zha* ◽  
Qian Zhang* ◽  
Huimin Duan

Traditional single-pixel imaging systems are aimed mainly at relatively static or slowly changing targets. When there is relative motion between the imaging system and the target, sizable deviations between the measurement values and the real values can occur and result in poor image quality of the reconstructed target. To solve this problem, a novel dynamic compressive imaging system is proposed. In this system, a single-column digital micro-mirror device is used to modulate the target image, and the compressive measurement values are obtained for each column of the image. Based on analysis of the measurement values, a new recovery model of dynamic compressive imaging is given. Differing from traditional reconstruction results, the measurement values of any column of vectors in the target image can be used to reconstruct the vectors of two adjacent columns at the same time. Contingent upon characteristics of the results, a method of image quality enhancement based on an overlapping average algorithm is proposed. Simulation experiments and analysis show that the proposed dynamic compressive imaging can effectively reconstruct the target image; and that when the moving speed of the system changes within a certain range, the system reconstructs a better original image. The system overcomes the impact of dynamically changing speeds, and affords significantly better performance than traditional compressive imaging.


2021 ◽  
pp. 20201356
Author(s):  
Feng-Jiao Yang ◽  
Shu-Yue Ai ◽  
Runze Wu ◽  
Yang Lv ◽  
Hui-Fang Xie ◽  
...  

Objectives: To investigate the impact of total variation regularized expectation maximization (TVREM) reconstruction on the image quality of 68Ga-PSMA-11 PET/CT using phantom and patient data. Methods: Images of a phantom with small hot sphere inserts and 20 prostate cancer patients were acquired with a digital PET/CT using list-mode and reconstructed with ordered subset expectation maximization (OSEM) and TVREM with seven penalisation factors between 0.01 and 0.42 for 2 and 3 minutes-per-bed (m/b) acquisition. The contrast recovery (CR) and background variability (BV) of the phantom, image noise of the liver, and SUVmax of the lesions were measured. Qualitative image quality was scored by two radiologists using a 5-point scale (1-poor, 5-excellent). Results: The performance of CR, BV, and image noise, and the gain of SUVmax was higher for TVREM 2 m/b groups with the penalization of 0.07 to 0.28 compared to OSEM 3 m/b group (all p < 0.05). The image noise of OSEM 3 m/b group was equivalent to TVREM 2 and 3 m/b groups with a penalization of 0.14 and 0.07, while lesions’ SUVmax increased 15 and 20%. The highest qualitative score was attained at the penalization of 0.21 (3.30 ± 0.66) for TVREM 2 m/b groups and the penalization 0.14 (3.80 ± 0.41) for 3 m/b group that equal to or greater than OSEM 3 m/b group (2.90 ± 0.45, p = 0.2 and p < 0.001). Conclusions: TVREM improves lesion contrast and reduces image noise, which allows shorter acquisition with preserved image quality for PSMA PET/CT. Advances in knowledge: TVREM reconstruction with optimized penalization factors can generate higher quality PSMA-PET images for prostate cancer diagnosis.


Author(s):  
Yang-Ting Hsu ◽  
Jo-Chi Jao

Radiologic technologists face various types of patients during multi-detector computed tomography (CT) examinations. In emergency departments, it is common to have patients who cannot follow instructions for the examinations. The asymmetric axial view of the head CT might affect the correctness of the clinician’s diagnosis. This study aimed to assess the impact of head positioning on the image quality of head CT using two phantoms. All scans were performed on a 16-slice CT scanner. In the control group, the tilted angle of the phantoms was 0[Formula: see text], and no multiplanar reconstruction (MPR) was performed. In the experimental groups, the tilted angles of the phantoms were 5[Formula: see text], 10[Formula: see text] and 15[Formula: see text], respectively, and MPR was performed afterwards. The results showed that if the head was tilted during the head CT examinations, image asymmetry and artifacts appeared without MPR. After MPR, one phantom showed that there were significant differences and the other phantom showed no significant differences quantitatively in image symmetry and artifacts between experimental groups and the control group, while both phantoms showed no significant differences qualitatively in image symmetry and artifacts between experimental groups and the control group. Although MPR can correct the image asymmetry and artifacts caused by tilted head positioning to some extent, it consumes time. Therefore, technologists should position the head as exactly as possible when performing head CT examinations.


Author(s):  
Halinda Fatmayanti ◽  
Kusworo Adi ◽  
Yeti Kartikasari

Background: Thorax MSCT examination is a diagnostic imaging that is capable of displaying both normal and pathological lung and respiratory organs. MSCT examination also has a better level of sensitivity and specificity compared to other modalities, but the radiation exposure given is very high, so the radiation dose given to patients is high. The reduction in radiation dose is very important because of the direct exposure to sensitive tissue. One method of reducing radiation dose is by reducing the tube voltage. However, the decrease in tube voltage causes a decrease in image quality as indicated by increased noise and decreased CNR. To maintain the quality of the image at low tube voltage setting, an IR reconstruction of SAFIRE was used. The purpose of this research is to know the impact of using SAFIRE on dose radiation and image quality of thorax MSCT.Methods: This study was an experimental study with a quasi-experimental study design. The object used was the N-1 Lungman chest phantom in which an artificial tumor was attached. Radiation dose assessment used CTDI value, while image quality assessment used noise and CNR. Data processing was conducted using linear regression test.Results: There was an effect of tube voltage setting and SAFIRE setting on radiation dose and image quality.Conclusions: Tube voltage ssetting and SAFIRE setting had an effect on radiation dose and image quality. Tube voltage setting and SAFIRE strength level setting that were able to provide optimal radiation dose and image quality were tube voltage of 80 kVp and SAFIRE strength levels 3 and 4 (S3 and S4). 


Author(s):  
Y. Zhang ◽  
W.H. Cui ◽  
F. Yang ◽  
Z.C. Wu

More and more high-spatial resolution satellite images are produced with the improvement of satellite technology. However, the quality of images is not always satisfactory for application. Due to the impact of complicated atmospheric conditions and complex radiation transmission process in imaging process the images often suffer deterioration. In order to assess the quality of remote sensing images over urban areas, we proposed a general purpose image quality assessment methods based on feature extraction and machine learning. We use two types of features in multi scales. One is from the shape of histogram the other is from the natural scene statistics based on Generalized Gaussian distribution (GGD). A 20-D feature vector for each scale is extracted and is assumed to capture the RS image quality degradation characteristics. We use SVM to learn to predict image quality scores from these features. In order to do the evaluation, we construct a median scale dataset for training and testing with subjects taking part in to give the human opinions of degraded images. We use ZY3 satellite images over Wuhan area (a city in China) to conduct experiments. Experimental results show the correlation of the predicted scores and the subjective perceptions.


2013 ◽  
Vol 710 ◽  
pp. 413-418
Author(s):  
Fei Guo ◽  
Mei Zhao ◽  
Mai Yu Zhou ◽  
Ming Quan Yang ◽  
Shan Shan Cong

Objective lens is the core part of a collimator, its quality has a direct impact on the collimators quality. Due to the small field of view and low image quality requirement, general collimator objective lens is difficult to achieve the requirement of testing an aerial camera s performance. So designing a large field of view, apochromatic collimator objective lens has an important practical significance. In this paper, the major qualifications were first proposed to design the collimator objective lens,according to which the initial configuration was confirmed. Then we used the ZEMAX optical design software to optimize the initial structure and normalized the optimized structural parameters. Finally the image quality of collimator objective lens was evaluated to make it achieve the requirement of qualifications.


Author(s):  
Jekaterina Porubova ◽  
Marco Klemm ◽  
Isabel Kiendl ◽  
Karlis Valters ◽  
Darja Markova ◽  
...  

Abstract Energy plans of many countries anticipate an increased use of biomethane for energy supply, i.e., in power and heat production as well as in the transport sector. Existing infrastructure of natural gas storage, supply and application provides a good platform to facilitate transfer to biomethane utilization on a larger scale. One key element of the biomethane system is the upgrade of the biomass-derived synthesis gas originating from different sources, to a quality of natural gas (SNG - Synthesis Natural Gas) via the methanation process for further injection into the natural gas grid.. The maximisation of efficiency of the methanation process is of critical importance in order to make biomethane technology viable for wider application. The aim of the study was to improve efficiency of the methanation process by finding the optimum temperatures and pressure. Theoretical modelling of adiabatic and isothermal methanation processes by using thermodynamic equilibrium calculations was introduced as a method for the study. The results show the impact of temperature and pressure changes on the overall efficiency of methane production. It can be concluded from the study that knowledge about the relation between temperature, pressure and the efficiency of the methanation process makes it possible to optimize the process under various biomass synthesized gas input conditions.


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