Interferometric optical fiber pressure sensor with temperature compensation

1990 ◽  
Author(s):  
Jean P. Herzog ◽  
Patrick Meyrueis
Keyword(s):  
Optical Fiber ◽  
Pressure Sensor ◽  
Temperature Compensation

scholarly journals Monolithic Structure-Optical Fiber Sensor with Temperature Compensation for Pressure Measurement

Materials ◽  
2019 ◽  
Vol 12 (4) ◽  
pp. 552 ◽  
Author(s):  
Wenhua Wang ◽  
Xinlei Zhou ◽  
Weina Wu ◽  
Jihua Chen ◽  
Shenlong He ◽  
...  
Keyword(s):  
Optical Fiber ◽  
Pressure Sensor ◽  
Temperature Compensation ◽  
Adhesive Bonding ◽  
Optical Fiber Sensor ◽  
Fused Silica ◽  
Deep Penetration ◽  
Seepage Pressure ◽  
Different Temperatures ◽  
The Difference

In this paper, an optical fiber pressure sensor cascading a diaphragm-assisted Fabry-Perot interferometer (FPI) and a fiber Bragg grating (FBG) is proposed and demonstrated. The sensor comprises an optical fiber, a fused-silica ferrule, and a fused-silica diaphragm. We use a femtosecond laser firstly to fabricate a pit on the end face of the ferrule and then investigate the laser heat conduction welding and deep penetration welding technology for manufacturing the seepage pressure sensor of the all-fused-silica material. We develop a sensor based on a monolithic structured FPI without adhesive bonding by means of all-laser-welding. The pressure characteristics of the sensor have good linearity at different temperatures. Also, the monolithic structured sensor possesses excellent resolution, hysteresis, and long-term stability. The environmental temperature obtained by the FBG is employed to compensate for the difference in seepage pressure at different temperatures, and the difference in seepage pressure responses at different temperatures is shown to be very small after temperature compensation.

scholarly journals High-precision optical fiber pressure sensor using frequency-modulated continuous-wave laser interference

AIP Advances ◽  
2021 ◽  
Vol 11 (2) ◽  
pp. 025038
Author(s):  
Lang Bai ◽  
Gang Zheng ◽  
Bin Sun ◽  
Xiongxing Zhang ◽  
Qiming Sheng ◽  
...  
Keyword(s):  
Optical Fiber ◽  
High Precision ◽  
Pressure Sensor ◽  
Continuous Wave ◽  
Continuous Wave Laser ◽  
Laser Interference ◽  
Wave Laser

Micromachined Pressure Sensors on Optical Fiber Tip

2009 ◽  
Vol 74 ◽  
pp. 149-152
Author(s):  
X.M. Zhang ◽  
M. Yu ◽  
Silas Nesson ◽  
H. Bae ◽  
A. Christian ◽  
...  
Keyword(s):  
Optical Fiber ◽  
Pressure Sensor ◽  
Linear Response ◽  
Applied Pressure ◽  
Pressure Sensors ◽  
Outer Diameter ◽  
Sensor Element ◽  
Batch Fabrication ◽  
In Vitro Measurements

This paper reports the development of a miniature pressure sensor on the optical fiber tip for in vitro measurements of rodent intradiscal pressure. The sensor element is biocompatible and can be fabricated by simple, batch-fabrication methods in a non-cleanroom environment with good device-to-device uniformity. The fabricated sensor element has an outer diameter of only 366 μm, which is small enough to be inserted into the rodent discs without disrupting the structure or altering the intradiscal pressures. In the calibration, the sensor element exhibits a linear response to the applied pressure over the range of 0 - 70 kPa, with a sensitivity of 0.0206 μm/kPa and a resolution of 0.17 kPa.

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