Calibration of high-aspect ratio quality control optical scanning system
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2012 ◽
Vol 664
(1)
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pp. 223-230
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1999 ◽
Vol 43
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pp. S275-S278
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1977 ◽
Vol 99
(1)
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pp. 46-50
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2005 ◽
Vol 15
(2)
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pp. 47-58
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