S-Genius, a universal software platform with versatile inverse problem resolution for scatterometry
Keyword(s):
Keyword(s):
2017 ◽
Vol 110
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pp. 371-381
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Keyword(s):
2005 ◽
Vol 24
(3)
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pp. 942-951
2018 ◽
Vol 37
(3)
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pp. 733-740
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