Precision heterodyne ellipsometry with an improved conic fitting algorithm
2017 ◽
Vol 7
(6)
◽
pp. 712-718
1989 ◽
Vol 21
(6-7)
◽
pp. 593-602
◽
Keyword(s):
1984 ◽
Vol 7
(1)
◽
pp. 79-91
◽
Keyword(s):