High-resistivity and high-TCR vanadium oxide thin films for infrared imaging prepared by bias target ion-beam deposition
Keyword(s):
Ion Beam
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Vanadium Oxide Thin Films Alloyed with Ti, Zr, Nb, and Mo for Uncooled Infrared Imaging Applications
2012 ◽
Vol 42
(5)
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pp. 901-905
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Keyword(s):