The study of novel PAG containing acid amplifier in EUV resist material

2013 ◽  
Author(s):  
Hyun Sang Joo ◽  
Jin Ho Kim ◽  
Joon Hee Han ◽  
Chang Wan Bae ◽  
Jin Bong Shin ◽  
...  
Keyword(s):  
Acid Amplifier

scholarly journals Exploration of solid-state nanopores in characterizing reaction mixtures generated from a catalytic DNA assembly circuit

2019 ◽  
Vol 10 (7) ◽  
pp. 1953-1961 ◽  
Author(s):  
Zhentong Zhu ◽  
Ruiping Wu ◽  
Bingling Li
Keyword(s):  
Solid State ◽  
Nucleic Acid ◽  
Base Pair ◽  
Quantitative Method ◽  
Dna Assembly ◽  
Characterization Methods ◽  
Catalytic Dna ◽  
Acid Amplifier

We adapt a solid-state nanopore for analyzing DNA assembly mixtures, which is usually a tougher task for either traditional characterization methods or nanopores themselves. A trigger induced nucleic acid amplifier, SP-CHA, is designed as a model. We propose an electrophoresis-gel like, but homogeneous, quantitative method that can comprehensively profile the “base-pair distribution” of SP-CHA concatemer mixtures.

Trioxane Derivative as an Acid Amplifier Exhibiting a Non-linear Organic Reaction

1998 ◽  
Vol 27 (8) ◽  
pp. 823-824 ◽  
Author(s):  
Koji Arimitsu ◽  
Kunihiro Ichimura
Keyword(s):  
Organic Reaction ◽  
Non Linear ◽  
Acid Amplifier

scholarly journals Monitoring the Acidolytic Behavior of a Latent Pigment Enhanced by an Acid Amplifier in Polymer Films.

2000 ◽  
Vol 13 (2) ◽  
pp. 221-222 ◽  
Author(s):  
Masaru Tahara ◽  
Koji Arimitsu ◽  
Sang-Wook Park ◽  
Sungeun Lee ◽  
Kunihiro Ichimura
Keyword(s):  
Polymer Films ◽  
Acid Amplifier

A Novel Concept of Acid Proliferation. Autocatalytic Fragmentation of an Acetoacetate Derivative as an Acid Amplifier

1995 ◽  
Vol 24 (7) ◽  
pp. 551-552 ◽  
Author(s):  
Kunihiro Ichimura ◽  
Koji Arimitsu ◽  
Kazuaki Kudo
Keyword(s):  
Novel Concept ◽  
Acid Amplifier

scholarly journals Characterization of Chemically Amplified Resists with "Acid Amplifier" for 193 nm Lithography.

1997 ◽  
Vol 10 (4) ◽  
pp. 551-558 ◽  
Author(s):  
Takeshi Ohfuji ◽  
Makoto Takahashi ◽  
Masaru Sasago ◽  
Soh Noguchi ◽  
Kunihiro Ichimura
Keyword(s):  
Chemically Amplified ◽  
Chemically Amplified Resists ◽  
193 Nm ◽  
Acid Amplifier

scholarly journals Novel Acid Amplifier Generating Disulfonimide as Superacid

2017 ◽  
Vol 30 (6) ◽  
pp. 645-649 ◽  
Author(s):  
Tomotaka Tsuchimura ◽  
Takeshi Kawabata
Keyword(s):  
Acid Amplifier

scholarly journals Synthesis and Characteristics of a Novel Acid Amplifier with a Low Absorbance at 193nm

1999 ◽  
Vol 12 (2) ◽  
pp. 293-296 ◽  
Author(s):  
Sang-Wook Park ◽  
Koji Arimitsu ◽  
Kunihiro Ichimura ◽  
Takeshi Ohfuji
Keyword(s):  
Acid Amplifier
Sign in / Sign up

Export Citation Format

Share Document