Optical position sensor for automatic microassembling operations

1995 ◽  
Vol 34 (9) ◽  
pp. 2660 ◽  
Author(s):  
Pere Llosas
Keyword(s):  
Position Sensor ◽  
Optical Position

A Glass Slab Optical Waveguide Detector with an Optical Position Sensor for Flow Analysis

1995 ◽  
Vol 24 (10) ◽  
pp. 933-934 ◽  
Author(s):  
Kin-ichi Tsunoda ◽  
Hiroko Ueno ◽  
Hideo Akaiwa
Keyword(s):  
Optical Waveguide ◽  
Flow Analysis ◽  
Position Sensor ◽  
Optical Position ◽  
Glass Slab

A Fast CMOS Optical Position Sensor With High Subpixel Resolution

2004 ◽  
Vol 53 (1) ◽  
pp. 116-123 ◽  
Author(s):  
N. Massari ◽  
L. Gonzo ◽  
M. Gottardi ◽  
A. Simoni
Keyword(s):  
Position Sensor ◽  
Optical Position ◽  
Subpixel Resolution

Novel monolithic pendulum tiltmeter with Nanorad resolution

2018 ◽  
Vol 85 (4) ◽  
pp. 244-251 ◽  
Author(s):  
Michael Kühnel ◽  
Florian Fern ◽  
Thomas Fröhlich
Keyword(s):  
Standard Deviation ◽  
Measurement Range ◽  
Position Sensor ◽  
Dead Weight ◽  
Complex Design ◽  
Optical Position ◽  
Large Measurement ◽  
Measuring Frequency ◽  
Working Principle

Abstract Tiltmeters with nanorad resolution in a large measurement range of ±9 mrad (±0.5○) and a very good linearity have been developed at the Technische Universität Ilmenau in the recent years. The working principle bases on the measurement of tilt-dependent lateral forces, which act on a hanging force-compensated weigh cell (precision balance). The disadvantage is the relatively complex design of the weigh cell mechanics, the large dead weight and the high manufacturing costs. For that reason a simplified tiltmeter was developed. It only consists of two components: a monolithic pendulum mechanics and an optical position sensor. State of the art pendulum tiltmeters contain several components that are linked by screwed, clamped or glued connections. This can limit the long-term-, temperature- or humidity stability of the tiltmeter. The position sensor achieves a standard deviation of ∼ 50 pm at a measuring frequency of 10 Hz. The length of the pendulum amounts to 0.1 m, its mass is ∼ 62 g. With this combination, the theoretical standard deviation of the tilt measurement should result to ∼ 0.6 nrad at 10 Hz measuring frequency and was approved by measurements. The measurement range of the new monolithic tiltmeter amounts ∼ ±2 mrad.

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