Spatial-frequency bandwidth in the photolithographic transfer of submicron gratings
2010 ◽
Vol 51
(1)
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pp. 10701
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1999 ◽
Vol 39
(23)
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pp. 3824-3833
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1981 ◽
Vol 64
(2)
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pp. 11-21
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1981 ◽
Vol 39
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pp. 32-33
1992 ◽
Vol 50
(1)
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pp. 464-465
Keyword(s):