A continuous single-crystal-silicon membrane deformable mirror using bimorph spring

Mapping Intimacies ◽

10.1117/12.2002785 ◽

2013 ◽

Author(s):

Tong Wu ◽

Takashi Sasaki ◽

Masayuki Akiyama ◽

Kazuhiro Hane

Keyword(s):

Single Crystal ◽

Single Crystal Silicon ◽

Deformable Mirror ◽

Silicon Membrane ◽

Crystal Silicon

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Large aperture deformable mirror with a transferred single-crystal silicon membrane actuated using large stroke PZT unimorph actuators

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. ◽

10.1109/sensor.2005.1497285 ◽

2005 ◽

Author(s):

Y. Hishinuma ◽

Eui-Hycok Yang

Keyword(s):

Single Crystal ◽

Single Crystal Silicon ◽

Deformable Mirror ◽

Silicon Membrane ◽

Crystal Silicon ◽

Large Aperture

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Ultrathin, flexible, hybrid solar cells in sub-ten micrometers single crystal silicon membrane

2014 IEEE 40th Photovoltaic Specialist Conference (PVSC) ◽

10.1109/pvsc.2014.6925070 ◽

2014 ◽

Cited By ~ 2

Author(s):

Pushpa Raj Pudasaini ◽

Manisha Sharma ◽

Francisco Ruiz-Zepeda ◽

Arturo A Ayon

Keyword(s):

Solar Cells ◽

Single Crystal ◽

Single Crystal Silicon ◽

Hybrid Solar Cells ◽

Silicon Membrane ◽

Crystal Silicon

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SINGLE-CRYSTAL SILICON CONTINUOUS MEMBRANE DEFORMABLE MIRROR WITH PZT UNIMORPH MICROACTUATOR ARRAYS

2004 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh2004.22 ◽

2004 ◽

Author(s):

Y. Hishinuma ◽

E.-H. Yang

Keyword(s):

Single Crystal ◽

Single Crystal Silicon ◽

Deformable Mirror ◽

Crystal Silicon

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15μM air gap 8×8/4×4 pixels single crystal silicon continuous membrane deformable mirror

2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) ◽

10.1109/transducers.2013.6627314 ◽

2013 ◽

Cited By ~ 1

Author(s):

T. Wu ◽

T. Sasaki ◽

M. Akiyama ◽

K. Hane

Keyword(s):

Single Crystal ◽

Single Crystal Silicon ◽

Air Gap ◽

Deformable Mirror ◽

Crystal Silicon

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Single-Crystal-Silicon Continuous Membrane Deformable Mirror Array for Adaptive Optics

IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006. ◽

10.1109/omems.2006.1708310 ◽

2006 ◽

Author(s):

Il Woong Jung ◽

Y. Peter ◽

E. Carr ◽

Jen-Shiang Wang ◽

O. Solgaard

Keyword(s):

Single Crystal ◽

Adaptive Optics ◽

Single Crystal Silicon ◽

Deformable Mirror ◽

Crystal Silicon

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Fabrication and Characterization of Organic Light-Emitting Diodes using Transparent Single-Crystal-Silicon Membrane

ECS Transactions ◽

10.1149/1.3005393 ◽

2019 ◽

Vol 13 (18) ◽

pp. 13-17

Author(s):

Su Hwan Lee ◽

Dal Ho Kim ◽

Hee-Doo Yang ◽

Gon-Sub Lee ◽

Jea-Gun Park

Keyword(s):

Single Crystal ◽

Light Emitting Diodes ◽

Single Crystal Silicon ◽

Organic Light Emitting Diodes ◽

Silicon Membrane ◽

Crystal Silicon ◽

Light Emitting ◽

Organic Light ◽

Fabrication And Characterization

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Plasmonic light trapping in ultrathin single crystal silicon membrane for solar cells application

2014 IEEE 40th Photovoltaic Specialist Conference (PVSC) ◽

10.1109/pvsc.2014.6925377 ◽

2014 ◽

Author(s):

Manisha Sharma ◽

Pushpa Raj Pudasaini ◽

Arturo A Ayon

Keyword(s):

Solar Cells ◽

Single Crystal ◽

Light Trapping ◽

Single Crystal Silicon ◽

Silicon Membrane ◽

Crystal Silicon

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Piezoelectric Unimorph Microactuator Arrays for Single-Crystal Silicon Continuous-Membrane Deformable Mirror

Journal of Microelectromechanical Systems ◽

10.1109/jmems.2006.872229 ◽

2006 ◽

Vol 15 (2) ◽

pp. 370-379 ◽

Cited By ~ 32

Author(s):

Y. Hishinuma ◽

E.-H. Yang

Keyword(s):

Single Crystal ◽

Single Crystal Silicon ◽

Deformable Mirror ◽

Crystal Silicon ◽

Piezoelectric Unimorph

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Single-Crystal-Silicon Continuous Membrane Deformable Mirror Array for Adaptive Optics in Space-Based Telescopes

IEEE Journal of Selected Topics in Quantum Electronics ◽

10.1109/jstqe.2007.893560 ◽

2007 ◽

Vol 13 (2) ◽

pp. 162-167 ◽

Cited By ~ 29

Author(s):

Il Woong Jung ◽

Yves-Alain Peter ◽

Emily Carr ◽

Jen-Shiang Wang ◽

Olav Solgaard

Keyword(s):

Single Crystal ◽

Adaptive Optics ◽

Single Crystal Silicon ◽

Deformable Mirror ◽

Crystal Silicon

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Large-scale membrane transfer process: its application to single-crystal-silicon continuous membrane deformable mirror

Journal of Micromechanics and Microengineering ◽

10.1088/0960-1317/23/12/125003 ◽

2013 ◽

Vol 23 (12) ◽

pp. 125003 ◽

Cited By ~ 3

Author(s):

Tong Wu ◽

Takashi Sasaki ◽

Masayuki Akiyama ◽

Kazuhiro Hane

Keyword(s):

Single Crystal ◽

Transfer Process ◽

Large Scale ◽

Single Crystal Silicon ◽

Deformable Mirror ◽

Crystal Silicon ◽

Membrane Transfer

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