Residual stresses in silicon dioxide thin films prepared by reactive electron beam evaporation

1994 ◽  
Author(s):  
Herve Leplan ◽  
Bernard Geenen ◽  
Jean-Yves Robic ◽  
Y. Pauleau
Keyword(s):  
Thin Films ◽  
Electron Beam ◽  
Residual Stresses ◽  
Silicon Dioxide ◽  
Electron Beam Evaporation

Y2O3 stabilized ZrO2 thin films deposited by electron-beam evaporation: Optical properties, structure and residual stresses

Vacuum ◽  
2008 ◽  
Vol 83 (2) ◽  
pp. 366-371 ◽  
Author(s):  
Qi-Ling Xiao ◽  
Cheng Xu ◽  
Shu-Ying Shao ◽  
Jian-Da Shao ◽  
Zheng-Xiu Fan
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Electron Beam ◽  
Residual Stresses ◽  
Electron Beam Evaporation

AlN thin films fabricated by ultra-high vacuum electron-beam evaporation with ammonia for silicon-on-insulator application

2005 ◽  
Vol 239 (3-4) ◽  
pp. 327-334 ◽  
Author(s):  
Ming Zhu ◽  
Peng Chen ◽  
Ricky K.Y. Fu ◽  
Weili Liu ◽  
Chenglu Lin ◽  
...  
Keyword(s):  
Thin Films ◽  
Electron Beam ◽  
High Vacuum ◽  
Electron Beam Evaporation ◽  
Silicon On Insulator ◽  
Ultra High Vacuum

Si-co-doped CuAlS2 :Mn conductive phosphor thin films prepared by electron beam evaporation using phosphor powder pellets

2015 ◽  
Vol 12 (6) ◽  
pp. 793-796
Author(s):  
Hideki Kawaguchi ◽  
Tadashi Ishigaki ◽  
Takayoshi Adachi ◽  
Yuki Oshima ◽  
Koutoku Ohmi
Keyword(s):  
Thin Films ◽  
Electron Beam ◽  
Electron Beam Evaporation ◽  
Phosphor Powder ◽  
Co Doped
Sign in / Sign up

Export Citation Format

Share Document