Integrated optical interferometer with micromechanical diaphragm for pressure sensing

1994 ◽  
Author(s):  
Gregory N. De Brabander ◽  
Joseph T. Boyd ◽  
Glenn Beheim
Keyword(s):  
Optical Interferometer ◽  
Pressure Sensing ◽  
Integrated Optical

Integrated optical interferometer gas sensor

1996 ◽  
Vol 11 (4) ◽  
pp. 213-215 ◽  
Author(s):  
Chen Fushen ◽  
Liang Qu ◽  
Liu Yunqi ◽  
Xu Yu
Keyword(s):  
Gas Sensor ◽  
Optical Interferometer ◽  
Integrated Optical

Monolithically integrated optical interferometer for refractometry

1997 ◽  
Vol 33 (11) ◽  
pp. 986 ◽  
Author(s):  
B. Maisenhölder ◽  
H.P. Zappe ◽  
M. Moser ◽  
P. Riel ◽  
R.E. Kunz ◽  
...  
Keyword(s):  
Optical Interferometer ◽  
Monolithically Integrated ◽  
Integrated Optical

Integrated optical interferometer with a stacked waveguide structure

1989 ◽  
Vol 28 (20) ◽  
pp. 4424 ◽  
Author(s):  
Shaodong Wu ◽  
Hans J. Frankena
Keyword(s):  
Waveguide Structure ◽  
Optical Interferometer ◽  
Integrated Optical

Ultrathin Si photodetector for an integrated optical interferometer

1999 ◽  
Author(s):  
Xiaoyu Mi ◽  
Minoru Sasaki ◽  
Kazuhiro Hane
Keyword(s):  
Optical Interferometer ◽  
Integrated Optical
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