Defect isolation using electron-beam probing RIE in multilevel high-density ASICs

1994 ◽  
Author(s):  
Sharad Prasad ◽  
Grant Lindberg ◽  
Hong Zhang
Keyword(s):  
Electron Beam ◽  
High Density ◽  
Defect Isolation

Fin Level Defect Isolation Inside a FinFET Using Electron Beam Alteration of Current Flow

2017 ◽  
Author(s):  
H.J. Ryu ◽  
A.B. Shah ◽  
Y. Wang ◽  
W.-H. Chuang ◽  
T. Tong
Keyword(s):  
Electron Microscopy ◽  
Electron Beam ◽  
Focused Ion Beam ◽  
Current Flow ◽  
Ion Beam ◽  
The Body ◽  
Complete Understanding ◽  
Root Cause ◽  
Transmission Electron ◽  
Defect Isolation

Abstract When failure analysis is performed on a circuit composed of FinFETs, the degree of defect isolation, in some cases, requires isolation to the fin level inside the problematic FinFET for complete understanding of root cause. This work shows successful application of electron beam alteration of current flow combined with nanoprobing for precise isolation of a defect down to fin level. To understand the mechanism of the leakage, transmission electron microscopy (TEM) slice was made along the leaky drain contact (perpendicular to fin direction) by focused ion beam thinning and lift-out. TEM image shows contact and fin. Stacking fault was found in the body of the silicon fin highlighted by the technique described in this paper.

Generation of high capacity, high density bubble domain patterns using electron beam technology

1979 ◽  
Vol 50 (B3) ◽  
pp. 2274-2276
Author(s):  
J. P. Reekstin ◽  
J.C. Potosky ◽  
R. G. Imerson
Keyword(s):  
Electron Beam ◽  
High Capacity ◽  
High Density

Electron beam lithography for high density meta fish scale operational at optical frequency

2009 ◽  
Vol 86 (4-6) ◽  
pp. 1081-1084 ◽  
Author(s):  
Yifang Chen ◽  
Alexander S. Schwanecke ◽  
V.A. Fedotov ◽  
V.V. Khardikov ◽  
P.L. Mladyonov ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
High Density ◽  
Optical Frequency ◽  
Fish Scale

scholarly journals Influences of Absorbed Dose Rate on the Mechanical Properties and Fiber–Matrix Interaction of High-Density Polyethylene-Based Carbon Fiber Reinforced Thermoplastic Irradiated by Electron-Beam

Polymers ◽  
2020 ◽  
Vol 12 (12) ◽  
pp. 3012
Author(s):  
Se Kye Park ◽  
Dong Yun Choi ◽  
Duyoung Choi ◽  
Dong Yun Lee ◽  
Seung Hwa Yoo
Keyword(s):  
Mechanical Properties ◽  
Electron Beam ◽  
Carbon Fiber ◽  
Dose Rate ◽  
High Density Polyethylene ◽  
Absorbed Dose ◽  
High Density ◽  
Absorbed Dose Rate ◽  
Dose Rates ◽  
Absorbed Dose Rates

In this study, a high-density polyethylene (HDPE)-based carbon fiber-reinforced thermoplastic (CFRTP) was irradiated by an electron-beam. To assess the absorbed dose rate influence on its mechanical properties, the beam energy and absorbed dose were fixed, while the absorbed dose rates were varied. The tensile strength (TS) and Young’s modulus (YM) were evaluated. The irradiated CFRTP TS increased at absorbed dose rates of up to 6.8 kGy/s and decreased at higher rates. YM showed no meaningful differences. For CFRTPs constituents, the carbon fiber (CF) TS gradually increased, while the HDPE TS decreased slightly as the absorbed dose rates increased. The OH intermolecular bond was strongly developed in irradiated CFRTP at low absorbed dose rates and gradually declined when increasing those rates. X-ray photoelectron spectroscopy analysis revealed that the oxygen content of irradiated CFRTPs decreased with increasing absorbed dose rate due to the shorter irradiation time at higher dose rates. In conclusion, from the TS viewpoint, opposite effects occurred when increasing the absorbed dose rate: a favorable increase in CF TS and adverse decline of attractive hydrogen bonding interactions between HDPE and CF for CFRTPs TS. Therefore, the irradiated CFRTP TS was maximized at an optimum absorbed dose rate of 6.8 kGy/s.

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