Comparison of the optical properties of oxide films deposited by reactive-dc-magnetron sputtering with those of ion-beam-sputtered and electron-beam-evaporated films
Keyword(s):
Ion Beam
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2017 ◽
Vol 11
(4)
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pp. 285-290
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2017 ◽
Vol 9
(5)
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pp. 05035-1-05035-6
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2009 ◽
Vol 282
(2)
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pp. 247-252
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2018 ◽
Vol 1124
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pp. 041042
2011 ◽
Vol 14
(4)
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pp. 427-431
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2013 ◽
Vol 271
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pp. 216-222
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2009 ◽
Vol 54
(3)
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pp. 1283-1287
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