Excimer laser-induced ablation in corneal surgery by a two-dimensional scanning method

1994 ◽  
Author(s):  
Angela Unkroth ◽  
Karin Pachomis ◽  
Eberhard Welsch ◽  
Jens-Uwe Walther ◽  
D. Zimare ◽  
...  
1994 ◽  
Author(s):  
Angela Unkroth ◽  
Karin Pachomis ◽  
Jens-Uwe Walther ◽  
D. Zimare

2006 ◽  
Vol 505-507 ◽  
pp. 67-72
Author(s):  
Yung Chun Lee ◽  
Chun Ying Wu

This paper presents a new method for fabricating 3D microstructures with an excimer laser micromachining system. A novel mask contour scanning method is developed for obtaining precise 3D microstructures with pre-described continuous surface profile. Two different microlenses with spherical and aspheric surfaces profiles with dimension less than 200 μm are fabricated on polycarbonate (PC) samples. The surface profiles are measured and compared with their theoretical counterparts. Excellent agreements both in profile shapes and dimensions are achieved. The surface roughness (Ra) of the machined surfaces is also measured and is less than 10 nm. The machining profile accuracy and surface smoothness of this proposed micromachining method show great potentials in fabricating micro-optic components such as aspheric microlenses or microlens arrays.


2012 ◽  
Vol 92 (9) ◽  
pp. 1374-1385 ◽  
Author(s):  
Akihiko Ito ◽  
Takahiro Mimae ◽  
Ying-Shan-Zhu Yamamoto ◽  
Man Hagiyama ◽  
Jun Nakanishi ◽  
...  

2006 ◽  
Vol 129 (1) ◽  
pp. 126-134 ◽  
Author(s):  
Yung-Chun Lee ◽  
Chun-Ming Chen ◽  
Chun-Ying Wu

This paper presents an effective and low-cost method for fabricating spherical and aspheric microlenses based on excimer laser LIGA-like processes. It is based on a newly developed excimer laser micromachining technique that can accurately machine a 3D microstructure with a predetermined continuous surface profile. The method is called the planetary scanning method since it is based on a combination of sample rotation and revolution and a concept of laser machining probability. Spherical and aspheric microlenses with precise and smooth surface profiles are fabricated by direct laser machining on polymer materials. Laser-machined microlenses are replicated by electroforming to obtain inverse metal molds. Finally, plastic microlenses are replicated from these metal molds using hot embossing method. The profile accuracy and surface roughness of the produced microlenses at each stage have been measured and monitored. The average surface profile accuracy is better than 1μm and average surface roughness is less than 10nm. Optical performance of the fabricated microlenses is evaluated by measuring the light intensity distribution at the focal plane and the focal length. Experimental data show that the characteristics of fabricated spherical and aspheric microlenses are well matched to the theoretical predictions, which demonstrates the controllability and accuracy of this micromachining process. Potential applications and further developments will be addressed.


2010 ◽  
Vol 26 (12) ◽  
pp. 980-990 ◽  
Author(s):  
Maria Clara Arbelaez ◽  
Tobias Ewering ◽  
Samuel Arba Mosquera

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