Laser technologies for micro-optics fabrication

1993 ◽  
Author(s):  
Vadim P. Veiko ◽  
Alexei K. Kromin ◽  
Evgeny B. Yakovlev
Keyword(s):  
Laser Technologies ◽  
Micro Optics ◽  
Optics Fabrication

Roadmap for micro-optics fabrication

2001 ◽  
Author(s):  
Thomas J. Suleski ◽  
Robert D. TeKolste
Keyword(s):  
Micro Optics ◽  
Optics Fabrication

Flexible micro-optics fabrication by direct laser writing toward CMOS compatible 3D optical circuit

2013 ◽  
Author(s):  
Chris Summitt ◽  
Sunglin Wang ◽  
Lee Johnson ◽  
Melissa Zaverton ◽  
Tom Milster ◽  
...  
Keyword(s):  
Direct Laser Writing ◽  
Laser Writing ◽  
Optical Circuit ◽  
Direct Laser ◽  
Micro Optics ◽  
Cmos Compatible ◽  
Optics Fabrication

Continuous micro-optics fabrication using halftone masks and proximity printing

2005 ◽  
Author(s):  
Chuankai Qiu ◽  
Changtao Wang ◽  
Chunlei Du ◽  
Xiaochun Dong
Keyword(s):  
Micro Optics ◽  
Optics Fabrication

Micro-optics fabrication by mask-based and mask-less mixed lithography process towards 3D optical circuits

2014 ◽  
Author(s):  
Chris Summitt ◽  
Sunglin Wang ◽  
Lee Johnson ◽  
Melissa Zaverton ◽  
Tao Ge ◽  
...  
Keyword(s):  
Lithography Process ◽  
Micro Optics ◽  
Optics Fabrication ◽  
Optical Circuits

Analog micro-optics fabrication by use of a binary phase grating mask

2004 ◽  
Author(s):  
Jinwon Sung ◽  
Mahesh Pitchumani ◽  
Jeremiah Brown ◽  
Heidi Hockel ◽  
Eric G. Johnson
Keyword(s):  
Phase Grating ◽  
Binary Phase ◽  
Micro Optics ◽  
Optics Fabrication
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