Three-dimensional finite element calculations of thermal stress in aluminum interconnect with tungsten via-studs
2012 ◽
Vol 212
(1)
◽
pp. 276-285
◽
2014 ◽
Vol 38
(8)
◽
pp. 857-862
◽
2002 ◽
Vol 30
(1)
◽
pp. 99-105
◽
1987 ◽
Vol 24-25
◽
pp. 880-883
◽
1994 ◽
Vol 150
(2-3)
◽
pp. 243-251
◽
2013 ◽
Vol 22
(3)
◽
pp. 032001
◽
1993 ◽
Vol 30
(6)
◽
pp. 387
2001 ◽
Vol 53
(6)
◽
pp. 1461-1476
◽