Photoelectronic detection of optical surface defects of optical system

1993 ◽  
Author(s):  
Shou-Cheng Cheng ◽  
Fu Wang
Author(s):  
Bao Bui Dinh

Decentration in lens systems (for example objectives) significantly degrades the quality of image, such as the coma. In order to reduce lens decentration, the lenses are centered while manufacturing, while gluing, while attachment in the mounts. Significant decrease in the lenses decentering in the mounts is achieved by using a special manufacturing equipment, which allow combining the optical axis of the lens with the base axis of the mount in assembly process. Solutions for coma's alignment by shifting, tilting and rotation their components are also provided in the construction of high-quality objectives (microscopes [1-7], photolithographic, aerophotographic). For optimization of methods for such adjustment the influence coefficients of decentering of each optical surface of the lens system on the value and sign of coma must be calculated and taken into account. In this paper, we propose a special mounting which combined with the Opticentric of Trioptics device to center the lenses. The results show that the decentering is significantly reduced (0.9µm) compared to (44.2µm) with using a reference mount.


Author(s):  
Yihui Zhang ◽  
Fan Wu ◽  
Yongying Yang ◽  
Jian Bai ◽  
Huiting Chai ◽  
...  

2008 ◽  
Vol 17 (04) ◽  
pp. 503-510
Author(s):  
HONGJUN WANG ◽  
ZHAO WANG ◽  
AILING TIAN ◽  
BINGCAI LIU

In the technology of optical surface measurement, the phase-shifting shear interferometer had been widely used. In measurement, the phase-shifting was introduced in time domain, and the measurement system adopted double optical path for change phase-shifting and shear, so the measurement accuracy was limited. To decrease error, a commonpath phase-shifting shear system based on birefringent optical devices was introduced. In this system, the lateral shear and phase-shifting 0, π/2, π, 3π/2 was introduced in the commonpath optical system. Because the birefringent optical devices can introduce shear in the collinear optical system, a new Jones matrix was established. Based on the Jones matrix theory, the principle theory was analyzed in detail. In the experiment, an optical surface was measured with this system. The theoretical analysis and experiment results demonstrate the feasibility of this approach.


2017 ◽  
Vol 84 (7-8) ◽  
Author(s):  
Haiyue Yang ◽  
Tobias Haist ◽  
Marc Gronle ◽  
Wolfgang Osten

AbstractLack of training data is one of the main problems when realizing optical surface inspection systems. In the best case, provision of enough representative training samples is difficult and most of the time expensive. In some cases, it is not possible at all. Here we present an alternative method where the surface defects are simulated. Thereby, we focus on metal surfaces in the microscale where diffraction phenomena start to play a major role. Ray tracing and scalar diffraction approximation methods are applied and compared.


Author(s):  
Huiting Chai ◽  
Pengfei Zhang ◽  
Yongying Yang ◽  
Jian Bai ◽  
Yihui Zhang

2014 ◽  
Vol 543-547 ◽  
pp. 658-661
Author(s):  
Chen Chen ◽  
Xiao Hui Zhang

An optical system which collimate the light of LED uniformly is proposed in this paper. This optical system consist of two part of optical surface. First a TIR lens collimate all of the light of the LED parallel to the z axis. Then the first reflector redirect the collimating light to a uniform distribution and the second reflector collimate the uniform light pattern. The simulation result of the designed system shows that the uniformity of the output wave-front is 0.78 and the total efficiency of the system is 89.32%.


2011 ◽  
Vol 291-294 ◽  
pp. 1733-1737
Author(s):  
Hong Yu Chu ◽  
Zhi Jiang Xie ◽  
Xu Xu ◽  
Li Dan Zhou ◽  
Qin Liu

The optical surface defects have a significant impact on functions and reliability of the whole optical system. In recent years, with the great attention on research of large-scale high-power solid-state laser device at home and abroad, the detection of optical surface defect has also been highly valued. Through continuous exploration, defect detection technology has made some achievements, but there are still some urgent technical problems to be solved. In this paper, the technology situation of optical surface defect will be summarized in two aspects: the surface cleanliness and surface flaws. Moreover, the technical difficulties and the problems which are currently facing will be analysis.


2013 ◽  
Vol 845 ◽  
pp. 894-898
Author(s):  
Salleh Sideq ◽  
S. Izman

This study investigates the effects of Friction Modifier Additives (FMA) added into the polishing slurry on Aluminium Nickel Phosphorous plated (Al-NiP) Hard-Disk Drive (HDD) substrates surface topography and surface defects during Chemical Mechanical Polishing (CMP) process. It is confirmed that addition of Friction Modifier Additives into the slurry reduces the overall coefficient of friction (CoF) during CMP process. By increasing the FMA concentration in the polishing slurry, the substrate surface topography such as waviness and surface roughness were improved significantly. It also lowered the defects counts especially scratch and sub-micron damage as revealed under Optical Surface Analyser (OSA) and Atomic Force Microscope (AFM) analysis.


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