Micromachined Fabry-Perot interferometer with corrugated silicon diaphragm for fiber optic sensing applications
Keyword(s):
1994 ◽
Vol 30
(3)
◽
pp. 215-221
◽
Keyword(s):
2002 ◽
Vol 51
(3)
◽
pp. 413-419
◽
Keyword(s):
Keyword(s):