Micromachined Fabry-Perot interferometer with corrugated silicon diaphragm for fiber optic sensing applications

Author(s):  
Alexis Mendez ◽  
Theodore F. Morse ◽  
Keith A. Ramsey
1994 ◽  
Vol 30 (3) ◽  
pp. 215-221 ◽  
Author(s):  
Kim D. Jovanovich ◽  
Russell E. Trahan ◽  
Michael S. Benbow

Nanoscale ◽  
2019 ◽  
Vol 11 (34) ◽  
pp. 15821-15827 ◽  
Author(s):  
Jun Ma ◽  
Yanglin Zhou ◽  
Xue Bai ◽  
Kai Chen ◽  
Bai-Ou Guan

Integration of suspended Pd-decorated graphene and fiber-optic sensing technology enables sensitive, fast-response, and intrinsically safe hydrogen detection.


2007 ◽  
Vol 364-366 ◽  
pp. 1203-1206 ◽  
Author(s):  
Yun Jiang Rao ◽  
Ming Deng ◽  
Tao Zhu ◽  
Qing Tao Tang ◽  
Guang Hua Cheng

This paper reports a novel micro extrinsic fiber-optic F-P interferometric (MEFPI) sensor micromachined on a conventional optical fiber (Corning SMF-28) by using a near-infrared femtosecond laser, for the first time to the best of our knowledge. The strain and temperature characteristics of such a sensor were investigated and the experimental results show that the strain and temperature sensitivities are 0.006nm/με and -0.0017nm/°C, respectively. This type of MEFPI sensors has a number of advantages when compared with conventional EFPI sensors, such as easy fabrication, high integration degree, good reliability, low temperature cross-sensitivity, low cost, and capability for mass-production, offering great potential for a wide range of sensing applications.


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