Ultradurable phosphide-based antireflection coatings for sand and rain erosion protection

Author(s):  
Desmond R. Gibson ◽  
Ewan M. Waddell ◽  
J. W. Kerr ◽  
Sandy A. D. Wilson ◽  
Keith L. Lewis
2005 ◽  
Author(s):  
Shay Joseph ◽  
Orna Marcovitch ◽  
Ygal Yadin ◽  
Avi Steimberg ◽  
Hedva Zipin

Author(s):  
Brennan Davis ◽  
Wilson Chi

Abstract The use of an antireflection coating for backside semiconductor failure analysis is discussed. The process of selecting an appropriate coating is described. Several known coatings are also described in regards to imaging quality, material properties, and the benefits to device analysis applications.


1996 ◽  
Vol 32 (19) ◽  
pp. 1835 ◽  
Author(s):  
A.E. Kelly ◽  
I.F. Lealman ◽  
L.J. Rivers ◽  
S.D. Perrin ◽  
M. Silver

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