High-resolution microfabricated Vernier-type displacement sensor using suspended gate field-effect transistors
2011 ◽
Vol 10
(1)
◽
pp. 011502
2008 ◽
Vol 26
(6)
◽
pp. 2583-2586
◽
2019 ◽
Vol 291
◽
pp. 89-95
◽
2013 ◽
Vol 14
(9)
◽
pp. 2249-2256
◽
1999 ◽
Vol 38
(Part 1, No. 2B)
◽
pp. 1182-1185
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