Recent progress in developing an extreme ultraviolet full-field exposure tool at Selete

2009 ◽  
Vol 8 (4) ◽  
pp. 041510 ◽  
Author(s):  
Kazuo Tawarayama
Keyword(s):  
Recent Progress ◽  
Extreme Ultraviolet ◽  
Field Exposure ◽  
Full Field

Recent progress of EUV full-field exposure tool in Selete

2009 ◽  
Author(s):  
Kazuo Tawarayama ◽  
Hajime Aoyama ◽  
Shunko Magoshi ◽  
Yuusuke Tanaka ◽  
Seiichiro Shirai ◽  
...  
Keyword(s):  
Recent Progress ◽  
Field Exposure ◽  
Full Field

Carbon nanotube pellicles: imaging results of the first full-field extreme ultraviolet exposures

2021 ◽  
Vol 20 (02) ◽  
Author(s):  
Joost Bekaert ◽  
Emily Gallagher ◽  
Rik Jonckheere ◽  
Lieve Van Look ◽  
Remko Aubert ◽  
...  
Keyword(s):  
Carbon Nanotube ◽  
Extreme Ultraviolet ◽  
Full Field ◽  
Imaging Results

scholarly journals Full-field imaging of thermal and acoustic dynamics in an individual nanostructure using tabletop high harmonic beams

2018 ◽  
Vol 4 (10) ◽  
pp. eaau4295 ◽  
Author(s):  
Robert M. Karl ◽  
Giulia F. Mancini ◽  
Joshua L. Knobloch ◽  
Travis D. Frazer ◽  
Jorge N. Hernandez-Charpak ◽  
...  
Keyword(s):  
Functional Imaging ◽  
Extreme Ultraviolet ◽  
Imaging Techniques ◽  
High Harmonic ◽  
Three Dimensional ◽  
Dynamic Imaging ◽  
Significant Advance ◽  
Grand Challenge ◽  
Diffractive Imaging ◽  
Full Field

Imaging charge, spin, and energy flow in materials is a current grand challenge that is relevant to a host of nanoenhanced systems, including thermoelectric, photovoltaic, electronic, and spin devices. Ultrafast coherent x-ray sources enable functional imaging on nanometer length and femtosecond timescales particularly when combined with advances in coherent imaging techniques. Here, we combine ptychographic coherent diffractive imaging with an extreme ultraviolet high harmonic light source to directly visualize the complex thermal and acoustic response of an individual nanoscale antenna after impulsive heating by a femtosecond laser. We directly image the deformations induced in both the nickel tapered nanoantenna and the silicon substrate and see the lowest-order generalized Lamb wave that is partially confined to a uniform nanoantenna. The resolution achieved—sub–100 nm transverse and 0.5-Å axial spatial resolution, combined with ≈10-fs temporal resolution—represents a significant advance in full-field dynamic imaging capabilities. The tapered nanoantenna is sufficiently complex that a full simulation of the dynamic response would require enormous computational power. We therefore use our data to benchmark approximate models and achieve excellent agreement between theory and experiment. In the future, this work will enable three-dimensional functional imaging of opaque materials and nanostructures that are sufficiently complex that their functional properties cannot be predicted.

RECENT PROGRESS AND PERSPECTIVES OF PLASMA HARMONICS

2013 ◽  
Vol 22 (03) ◽  
pp. 1350027 ◽  
Author(s):  
R. A. GANEEV
Keyword(s):  
Laser Ablation ◽  
Harmonic Generation ◽  
Recent Progress ◽  
Extreme Ultraviolet ◽  
High Order Harmonic Generation ◽  
New Approach ◽  
High Order Harmonic ◽  
Radiation Generation ◽  
Plasma Plumes ◽  
Extreme Ultraviolet Radiation

We review recent achievements of high-order harmonic generation in the plasma plumes produced during laser ablation of various materials. These studies have demonstrated the attractiveness of a new approach in coherent extreme ultraviolet radiation generation. We also present the general ideas of potential goals of plasma harmonic studies and perspectives of the development of this relatively new field of nonlinear optics.

Study of 157 nm resists with full field exposure tools

2005 ◽  
Author(s):  
Yayi Wei ◽  
Nickolay Stepanenko ◽  
Michael Sebald ◽  
Christoph Hohle ◽  
Francis M. Houlihan ◽  
...  
Keyword(s):  
Field Exposure ◽  
Full Field

Optical coatings for the 157 nm full-field exposure tool FS1

2004 ◽  
Author(s):  
Minoru Otani ◽  
T. Itho ◽  
S. Kuwabara ◽  
R. Biro ◽  
H Fukushima ◽  
...  
Keyword(s):  
Optical Coatings ◽  
Field Exposure ◽  
Full Field

Extreme Ultraviolet Lithography Using Small-Field Exposure Tool: Current Status

2008 ◽  
Vol 47 (6) ◽  
pp. 4866-4871 ◽  
Author(s):  
Kazuo Tawarayama ◽  
Shunko Magoshi ◽  
Yuusuke Tanaka ◽  
Seiichiro Shirai ◽  
Hiroyuki Tanaka
Keyword(s):  
Extreme Ultraviolet ◽  
Current Status ◽  
Small Field ◽  
Extreme Ultraviolet Lithography ◽  
Field Exposure ◽  
Ultraviolet Lithography

scholarly journals Full-Field Optical Coherence Tomography as a Diagnosis Tool: Recent Progress with Multimodal Imaging

2017 ◽  
Vol 7 (3) ◽  
pp. 236 ◽  
Author(s):  
Olivier Thouvenin ◽  
Clement Apelian ◽  
Amir Nahas ◽  
Mathias Fink ◽  
Claude Boccara
Keyword(s):  
Optical Coherence Tomography ◽  
Multimodal Imaging ◽  
Recent Progress ◽  
Optical Coherence ◽  
Full Field ◽  
Diagnosis Tool
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